Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

VER2000/4000

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Weight 1.24 kg Rc 3/8, 1/2: 2.20 kg, Rc 3/4: 2.81 kg Note 1) Set the inlet pressure by 0.05 MPa or larger than the required maximum set pressrue.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Description Long 500 420 3 0.52 to 1.63 80 160 IF32 IF31 IF30 Long 1,000 800 4 0.61 to 1.91 160 320 Cover q SPCD SPCD 12 ADC Mounting plate SPCC Stainless steel 304 Stainless steel 304 w Long 1,800 1,450 5 0.69 to 2.23 280 560 Bellows e r PBP or Stainless steel 304 Long 2,600 2,000 6 0.70 to 2.28 400 800 Body C3604B or Stainless steel 304 ON-flow: Flow volume under which a microswitch starts

Electronic Pressure Switch Series (Separate Type)

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Due to its small size, the sensor can be installed close to a pad.

ZSE2/ISE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.

VCB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact: Single valve volume reduced by 15% (Class 3) VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

VXZ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact, lightweight and large valve capacity Diaphragm VX3 ! VXA VN Wide variations enables a wide range of fluids control.

XL

1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa = 145 psi

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 100mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 100mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 100mm, Stroke Adjusting Unit: A (Adjuster Bolt), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 1000mm, Stroke Adjusting Unit: A (Adjuster Bolt), Auto Switch: A90--Reed, AC Volt, Horizontal

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 200mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A90--Reed, AC Volt, Horizontal

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 200mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A90V--Reed, DC Volt, AC Volt, Vertical

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 200mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 200mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 200mm, Stroke Adjusting Unit: A (Adjuster Bolt), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 300mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 300mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 300mm, Stroke Adjusting Unit: A (Adjuster Bolt), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)