• . ~ l'l' 73 109 94 G 118 : II> :: S' 102 78 97 90 , ;, Rod flange: Head flange: ;~ ~ i it -Foot'L' 44 433 386 476 F G I w I ~ t , L, F 73 334 297 367 I~I 281 102 250 309 44 210 185 229 73 160 141 G 175 134 , 102 11 7 ~ l. 129 5 ~SIVC Series CS2 Construction Component Parts Component Parts .. o~., '." :1'1. MatElrial '...~ tie~ripJion Ntit~ : Nti.: No. Description Material ,.
52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97
16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97
insertion 54 12 1532 CY1H Series Magnetically Coupled Rodless Cylinder Linear Guide Type Dimensions Single axis type / 15, 20, 25 CY1H15/20/25 L LL 4 x M thread depth MM PA 15 20 25 CY1H -B Guide central axis ZZ XA XB PB Piping port surface S + Stroke LW 2 x P EB EA HC HP H HA HB NT HG HT Square nut for body mounting J 8 PP W N A Z + Stroke Square nut insertion TW NL CY3B CY3R CY1S (mm) Model A 97
override VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97
CAUTION 236 46 Cassette type Full MESK 49 532 Slit Valve XGT Series Dimensions Cassette type standard/XGT312 440 336 336 60 50 50 50 112 377 244 59 Valve seat side (XGT312, 313, and 311 common) Cassette type half MESK/XGT313 60 405 45 36 XLA XL 59 XLQ XM XY Non-cassette type/XGT311 D62 50 Opening size XSA 348 336 Opening size XVD XGT XGT 280 97 CYV 59 244 533 XGT Series Made to Order Specifications
2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97
.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26 25.5 121.5 138.5 89.5 69 458 A XL Series Common Option 1 Heater Valve heaters are common for models XLA, XLC, XLD, XLF, XLG and XLH. Power consumption specifications are shown in the below table.
Model ZK2m07 ZK2m10 ZK2m12 ZK2m15 Noise level [dB (A)] ZK2G (High-noise reduction silencer exhaust) 46 55 63 69 ZK2A (Silencer exhaust) 59 66 75 76 Actual values under SMCs measurement conditions (Not guaranteed values) Weight Single Unit Pressure Sensor/Pressure Switch for Vacuum Single unit model Weight [g] ZK2P00KmNmA (Vacuum pump system, Single unit, Without pressure sensor/switch) 97
Width across flats 4(2) Width across flats 4(2) 32 78.6 32 61 52.5 61.5 67.5 87.5 53.61) 22 44.11) 18 30 (Rotating angle) 30 (Rotating angle) 85 80 57 106 100 71.5 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-TF80BMl-AL12 208 203 243 ZP3E-TF100BMl-AL12 316 305 388 ZP3E-TF125BMl-AL12 24.3 M12 x 1.25 4 Width across flats 19 Seal washer 62 71 77 97
.;4 ; 1:16 ;K ;L y E D H H ZPTlOB 10 12 16 25 36.5 59.5 72.5 92.5 93 5.5 13.8 5.5 ZPT138 13 15 1&5 27.5 39 62 75 95 95.5 8.7 19 7.5 ZPTl68 16 18 20 29 40.5 63.5 76.5 92.5 97 9.9 21 8.5 12 Series ZPT /With Buffer , Connection With Barb Filtlng(Buffer) Pad Type Flat, Flat with rib, Deep Vacuum Entry Vertical Mounting Buffer Body 10 '13'16 10 .
2.7 Contact protection box internal circuits 4 Lead wire colors inside ( ) are those prior to conformity with IEC standards. 4.5 Operating range l 4.5 Operating range l 10 CD-P11 10 Most sensitive position OUT Brown [Red] Most sensitive position Choke coil Surge absorber Values inside ( ) are for D-A93 OUT Blue [Black] CD-P12 OUT(+) Brown [Red] Choke coil Zener diode OUT() Blue [Black] 97
56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04 : 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97
IDF4E to 11E IDU3E to 6E IDF4E, 6E, 8E, 11E IDU3E, 4E, 6E 34 Circuit breaker Signal cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection Terminal block 32 97 15 Power cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection 40 67 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco
M A A CD CL CU CW CX CZ RR T Data 32 40 50 63 148 5.8 11.2 6.6 52.5 30 112.4 65 57 72.5 71 5.5 69.5 8 59 48 56 65 34 139 161 10 151 14 20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97
8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97
Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Effective thread length MB MB 4-J 16 GF 4-J V Q VA N K F GE MB1 BN A H S + Stroke ZZ + Stroke CA2 CS1 C76 C85 C95 Effective thread length (mm) Width across flats Bore size (mm) D F B A BP GL B2 BN GC GL1 C GA GB GD Ee11 CP95 32 10 12 13 54 19.5 22 G 1/8 7.5 46 97
Do not use the products in this catalog as safety accessories stipulated in Art. 1, paragraph 2.1.3 and Art. 3, paragraph 1.4 of Pressure Equipment Directive (97/23/EC). The Pressure Equipment Directive defines a safety accessory as a device which is designed to prevent pressure equipment from exceeding the allowable limit values. 3. Confirm the regulating pressure range.
flange style142 g 241 g Weight/Without Auto Switch (g) Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 39 46 53 60 67 74 16 52 61 69 78 86 95 20 89 102 116 129 143 156 170 183 197 211 25 124 141 157 174 190 207 224 240 257 273 Weight/With Auto Switch (Built-in magnet) (g) Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 47 54 62 69 76 83 16 63 71 80 88 97
(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120