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DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

(42 mA) 24 VDC 1 W (42 mA) 0.7 W (29 mA) (3) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) 1.2 VA (6 mA)

(42 mA) 24 VDC 1 W (42 mA) 0.7 W (29 mA) (3) 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) 1.2 VA (6 mA) 200 VAC 1.0 VA (5 mA) 1.3 VA (5.9 mA) 220 VAC 1.1 VA (5 mA) Plug-in, L plug connector, M plug connector (With light/surge voltage suppressor) Electrical entry (1) Note 1) Grommet

(42 mA) 24 VDC 1 W (42 mA) 0.7 W (29 mA) (3) 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) 1.2 VA (6 mA) 200 VAC 1.0 VA (5 mA) 1.3 VA (5.9 mA) 220 VAC 1.1 VA (5 mA) Plug-in, L plug connector, M plug connector (With light/surge voltage suppressor) Electrical entry (1) Note 1) Grommet

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

= 26n + 172 11 to 16 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 16 stations: W = 54n + 264 Note 3) SY3000 Weight W (g) n: Stations (D-sub connector) Main valve/pilot valve common exhaust type Internal pilot External pilot Pilot exhaust type Pilot valve individual exhaust type SY5000 Lubrication Not required Unrestricted 150/30 Dust proof Mounting orientation Impact/Vibration

= 26n + 172 11 to 16 stations: W = 26n + 199 Note 3) SX3000 Weight W (g) n: Stations Lubrication Not required Unrestricted 150/30 Dust proof 2 to 10 stations : W = 54n + 227 11 to 16 stations: W = 54n + 264 SX5000 Mounting orientation Impact/Vibration resistance m/s Note) Note 1) Available with up to 16 solenoids.

Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Rolling Yawing 4 3 4 LXF Model Load movement direction a = 1000 2000 a Mep a = 2000 L1 (mm) Pitching Rolling Yawing a = 3000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 3 0 1 2 Transfer load m (kg) a = 1000 300 L2 (mm

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

= 50 mm V = 200 mm/s (26) l2 = 100 mm V = 200 mm/s 50 50 100 CL 100 100 100 80 CL1 80 50, 63 80 80 MLGC 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 CNG 32, 40 32, 40 32, 40 MNB 25 25 CNA 20 20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 =

W B A A B W B: Retraction locking F: Extension locking 9-11-4 4 Series MLGP Specific Product Precautions 2 Be sure to read before handling. Mounting Piping Warning Warning Depending on the operating condition, change the position of plugs for the piping port. 1. For M5 After tightening by hand, tighten additional 1/6 to 1/4 rotation with a tightening tool. 2.

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

This matches the driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

Distance from Top of Auto Switch l1 80 70 Safety distance (mm) 60 Operable range 50 40 l1 30 l1 20 Dangerous range 10 0 0 5000 10 15000 20 Welding current (A) l2 80 70 Safety distance (mm) 60 50 Operable range 40 l2 l2 30 20 10 Dangerous range 0 0 5000 10 15000 20 Welding current (A) 1314 Series CKQ /CLKQ Specific Product Precautions 7 Be sure to read before handling.

(65 ) 0x000C (12) 0 R/W 0x0 (66 ) 0x0010 (16) 0 R SMC Corporation 0x0011 (17) 0 R www.smcworld.com 0x0012 (18) 0 R ISE70-02-L2 0x0013 (19) 0 R ID ISE70-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93