3 Way Direct Acting NVKF 300 Series

or less (Standard) 95"F or less (Low power cons!

Power Valve: Economy Valve Series VEX5

h Grommet terminal i Conduit terminal j DIN terminal a Model b d e f VEX5510 VEX5511 19 130 110 9 12 2.3 204 204.5 222 221.5 32 VEX5710 VEX5711 136 120 9 20 2.3 221 221.5 239.5 239 VEX5910/5911 Bracket (Option) Pressure gauge (Option) Grommet terminal (E) DIN terminal (D) Applicable O.D. 6 to 8 Conduit terminal (T) 1/4 (P2) 1/4 (P1) Refer to page 2449.

3 Port Air Operated Valve

x 3.2 (For mounting) 26.2 1/8 12 (PA) port 21.5 NC 12 2A 3.4 20.4 16 (1.6) 58.2 (9) 65.2 2 x 3.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (35) 36 35 31 25 (17.5) 16.5 (45) 26.2 15 (20.9) (Distance between ports) 2.8 (54.5) 1/8, 1/4 1(P), 3(R) port 4.5 1P 26.5 NO 3 3R M5 x 0.8 (Breathing hole) 16 20.4 53.7 01 02 A B For vacuum/VPA342V-1(-F) 1/8, 1/4 2(A) port

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct Plumbing

Body Ported, Voltage: 24VDC, Electrical Entry: Grommet, Orifice Size: 1.6mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: NPTF, Body/Seal Material: Body C37, Seal FKM, Option: Foot Bracket

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: T (NPTF), Body/Seal Material: Body C37, Seal FKM, Option: F (Foot Bracket)

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT), Body/Seal Material: Body C37, Seal FKM, Option: F (Foot Bracket)

BP1000

0.11 0 20 40 60 80 100 Flow rate (slpm, N2) .69'' (17.5) 2.00'' (50.8) A A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-F (Hexagon width across flats) (Hexagon width across flats) AS22 1FE-01-04SK 12.7 27.5 20.4 4 9.3 26 TMH AS22 1FE-01-06SK 13.5 27.5 20.4 13.4 6 11.6 27 12 12 R 1/8 44.9 49.9 48 53 14.2 AS22 1FE-01-08SK 18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37

PVQ PROPORTIONAL VALVE. VALVE, PROPORTIONAL. VALVE. PVQ NO SIZE RATING. 0.80129 lb. 2H.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

PSxx-OMS0006CN

MPa ZSE20 5.1 kPa ZSE20F5.0 kPa 1.5ms ON OFF -26No.PS-OMS0006CN-G [F 2] [F 3] 32 0 ms [F 4] 33 [F 5] [F 6] 35 0% [F10] 36 std() [F11] 41 1000 [F80] 42 OFF [F81] 43 OFF [F82] 45 A [F90] 46 OFF [F96] [F97] [F98] 48 () [F99] 49 OFF -27No.PS-OMS0006CN-G [F 0] (kPa/MPa) <> [F 0] [F 0] ZSE20F ZSE20 ISE20 MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 2 0.001 0.001 0.01 kgf/cm bar 0.001 0.001

PROPORTIONAL VALVE. SOLENOID VALVE. 100 lb.

PSxx-OMU0002CN

kPa ONOFF ISE20A0.050 MPa ZSE20A5.1 kPa ZSE20AF5.0 kPa 1.5 ms OUT1 ON OUT1 OFF -28No.PS-OMU0002CN-D [F 2] OUT2 34 [F 1] OUT1 [F 3] 36 0 ms [F 4] 37 [F 5] FUNC 39 [F 6] 41 0% [F10] 42 std() [F11] 48 1000 [F80] 49 OFF [F81] 50 OFF [F82] 52 A [F90] 53 OFF [F96] 55 [F97] 56 OFF [F98] 58 () [F99] 60 OFF XY "---" -29No.PS-OMU0002CN-D [F 0] (kPa/MPa) <> [F 0] [F 0] ZSE20AF

Valve Type: N.C. Base Mounted, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 1.6mm, Port Size: w/o Sub-Plate w/Mounting Screw, Thread Type: Rc, Body/Seal Material: Body SUS, Seal FKM, Option: -

Base Mounted), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: w/o Sub-Plate w/Mounting Screw, Thread Type: Rc, Body/Seal Material: H (Body SUS, Seal FKM)

4/5 Port Air Operated Valve SYJA3000 Series

Note 3) Model No. for 5 port base mounted type without sub-plate is SYJA540. 1478 4/5 Port Air Operated Valve SYJA5000 Series Dimensions/Body Ported Dimensions/Base Mounted 2 position single: SYJA5120-M5(-F) 2 position single: SYJA5140-01 41.5 2 x 4.3 (For mounting) 19.5 M5 x 0.8 (Pilot port) 37.5 4 M5 x 0.8 (Pilot port) 11 B A 5 16 A B SYA 1 1 24 10 2 x 2.6 (For manifold mounting) M5 x 0.8

VHS20/30/40/50

F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

F E X H .

SYJA3000

11 (0.6) 2 position double 110 SYJA7220-01 Body ported Base mounted (With sub-plate) 8.5 (0.47) 9 (0.5) [6.5 (0.36)] 3 position closed center SYJA7320-01 1/8 M5 X 0.8 3 position exhaust center SYJA7420-01 120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7