60

VHS20 to 50-A . ; . ; Built-in silencer (Option) = = @ @ 2 1 (IN) 2 (OUT) IN OUT B B : : Cross section of EXH port > > 3 (EXH) EXH Option Part No.

High Vacuum L Type Valve

5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

Applicable Auto Switch Model

Applicable Auto Switch Model Refer to p.5.3-2 to 5.3-75 for the detailed specifications of auto switches.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

PSxx-OMU0002CN

4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Cylinder

Li , I z I With auto switch Bore size 47.5 52.5 57.5 21.5 35.5 40.5 45.5 3 62.5 20 6 30.5 6 10' 45.5 .50.5 \ 55,5 60.5 75. 7 ~.Jo 2 1 _~ 35.5 \ 40.5 55.5 \ 3 26 :60:5 00.5 30.5 45.5 54.5 59.5 64.5 69.5 79.5 9 33.5 15 35.5 40.5 55.5 \ 4 23 ~ . eorEt size ; D ., E NN A X B' F GA GB LH LX A lI' B Mt\1 oLC ~ ~T : H ~ . . . Y .. ".,.. , ",. ,." ,. ,." , .. .' .

PSxx-OMU0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8,433: *2) 1. 2. 3. 1. 2. 3. 4

CE

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase to 200 5 phase to 30 Sanyo Denki Co., Ltd. 5 phase to 80 5 phase to 100 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5

Single Axis Electric Actuator Series LJ1

100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase to 200 5 phase to 30 Sanyo Denki Co., Ltd. 5 phase to 80 5 phase to 100 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

17

Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

Title not found

NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

4-channel Flow Monitor ( compatible)

(2) Conversion formula from the measurement value to the process data: (PD) = (Pr b) / a Pr: Measurement value and directive value PD: Measurement value (process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Applicable products Unit Range Inclination a Intercept b 4 L/min 0.004 0 16 L/min 0.016 0 L/min 40 L/min 0.04 0 100 L/min 0.1 0 250 L/min 0.25

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

ACB ACB SYJ 2-4.5 (Mounting hole) SX 57.5 VK 52.5 51 3(R) 1(P) 3(R) 1(P) VZ 9 16 32 17 4 VF VFR 10 4 10 P=11 L2 VP7 36.5 41.5 L1 VP4 45 M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station