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Lakag: Pori to Port (lnt6.nat) no o 6xod 0.035 cublc lt pr mhut at tm PstG t6.9 kgflcm') Op.atlng Pro$ur$: 28' Va4uum ro 300 PSG @ rgtcm:) M6laa|sr All houBlng psts atumtnum dt.castms, Spool.nd alv 44OF ltalntds st*t. h6at trortd to 582 Rockw C aM pr$lvat6d. Slv O.Fhg3 Buna N. S9.crs Dkin. Bumor ur6thde rubbr 4.

pressure switch Vacuum pressure gauge Exhaust port With valve Vacuum adapter ZSE4E ZSE4B ZSE4 Series With supply valve/ release valve With supply valve Built-in silencer Port exhaust 100 (3.5) 63 (2.2) (N)ZL112 200 (7.0) 126 (4.4) (N)ZL212 2 Multistage Ejector Series (N)ZL Selection ZL112 ZL212 Exhaust characteristics Exhaust characteristics 100 90 100 90 Vacuum pressure Vacuum pressure 300

Documents 7.1 Specifications Models Specification IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 Fluid Compressed air Operati Inlet air temperature oC 5 to 65 ng range Inlet air pressure MPa 0.15 to 1.0 (Note 3) (Note 1) Ambient temperature (Humidity) oC 2 to 45 (Relative humidity 85 % or less) Outlet air 3 oC 204 312 552 810 pressure dew Standard condition (ANR) (Note 2) point Outlet air 7 oC 300

IDFB11E IDFB15E 10 SCFM 15 SCFM 25 SCFM 41 SCFM 59 SCFM 71 SCFM (ANR) (1) 37 F (2.8C) (17 m 3/h) (25 m 3/h) (43 m 3/h) (70 m 3/h) (100 m 3/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM 80 SCFM 45 F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110

Flow Switch Flow Rate Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid Compatibility with the PFG300 digital flow monitor 0.01 0.02 0.05 1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300

Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Mounting Height Operating Range Auto Switch Mounting Groove Position Auto Switch Mounting 25 12 OUT 491 98 147 196 245 295 344 IN 378 76 113 151 189 227 264 Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 105 114 124 132 142 152 16 126 136 146 156 166 175 20 195 211 225 239 255 270 285 300

Use at high temperalure up to 300"F. . Double acting only 250 PSt (17.5 I PSI -4 -300"F (-202 -20 inch/sec No cushion available Double end. Front nose, Rear Pivot HolII TO ORDER Sbd( Sirofe Lbt n"u@ Ex.) NCUB 075-040GXBG ---EHiqh temperature Aulo-sryitch capable not available. . Low temperature down to -22"F. .

Cycle Rate 300 cPM Weight (Valve Body Only) oz. (o) 5.1 (144.6) 10.3 (292) Materials Patented Spool and Sleeve Design High Flow vs.

Tightening torque (Nm) M22 x 1.5 Mounting nut width across flats (mm) Bore size (mm) Mounting nut thread 20 25 32 40 26 45 M24 x 1.5 32 60 M30 x 1.5 38 85 M33 x 1.5 41 110 2.

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

200 212 300 312 L1 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 Note) The left and right brackets are mounted on the air suction filter single unit. 278

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 100 Lateral load F (N) 80 10 63 50 40 32 25 Operating pressure 0.5MPa Operating pressure 0.4MPa Graph 1 20 1 10 100 300 1000 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 Caution 100 Load weight kg 80 1.

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.

(OUT2) [2nL] (20 ) [2PL] 3 (OUT2) [2nH] (20 ) [2PH] () -28No.PF-OMO0007CN [F_3] [-] 9L,3 3 9 -29No.PF-OMO0007CN <> 3[F_][d_][unL] [unL] [Loc] 3 <> 3[Loc] [unL] 3 -30No.PF-OMO0007CN -31No.PF-OMO0007CN () IN IN -32No.PF-OMO0007CN IN (30 ) -33No.PF-OMO0007CN (OUT1) 80 mA OUT1 OFF (OUT2) 80 mA OUT2 2 2 () -34No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 N2 050 () 110

N 16 28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32 g 60 100 140 237 351 541 992 1,850 3,340 6,460 1) 1625 =20mm 3263 =30mm 80125 =50mm 0.5MPa MHS4 MHS4 -16D MHS4 -20D MHS4 -25D MHS4 -32D MHS4 -40D MHS4 -50D MHS4 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110

UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300

(Newark) 3434 US Hwy. 22 West, Ste. 110 Somerville, NJ 08876 Tel: (908) 253-3241 FAX: (908) 253-3452 Asia JAPAN SMC Corporation KOREA SMC Pneumatics Korea Co., Ltd. CHINA SMC (China) Co., Ltd. HONG KONG SMC Pneumatics (Hong Kong) Ltd. SINGAPORE SMC Pneumatics (S.E.A.) Pte. Ltd. PHILIPPINES SMC Pneumatics (Philippines), Inc. MALAYSIA SMC Pneumatics (S.E.A.) Sdn. Bhd.

(Newark) 3434 US Hwy. 22 West, Ste. 110 Somerville, NJ 08876 Tel: (908) 253-3241 FAX: (908) 253-3452 Asia JAPAN SMC Corporation KOREA SMC Pneumatics Korea Co., Ltd. CHINA SMC (China) Co., Ltd. HONG KONG SMC Pneumatics (Hong Kong) Ltd. SINGAPORE SMC Pneumatics (S.E.A.) Pte. Ltd. PHILIPPINES SMC Pneumatics (Philippines), Inc. MALAYSIA SMC Pneumatics (S.E.A.) Sdn. Bhd.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or