Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: A90V--Reed, DC Volt, AC Volt, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M12-4 Pin Connector, Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: A73C--Reed, DC Volt.>5,<24, LED, Connector, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Brake mechanism added

100 200 300 400 500 100 200 300 400 500 Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K. NO NO YES Is it possible for cable of stroke reading cylinder to be wired separately from the power line? Is there any influence of noise? YES NO YES NO Can the system be operated below 14.5 mT? Do not use it since it will result in a miscount.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

3

15 600 500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.

CE2

To use the system in a magnetic field that exceeds this value, use a magnetic material to shield the sensor unit. 63 50 50 40 40 YES 100 200 300 400 500 100 200 300 400 500 NO Does the mounted load exceed the load given in the diagram? Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K.

Compact Cylinder

Lateral load Operating pressure: 1 MPa 1000 200 300 500 Stroke Eccentric distance 100 100 Load weight (kg) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 63 Allowable lateral load (N) 50 40 63 1 32 25 20 50 40 10 32 0.1 25 10 100 200 300 500 1000 Maximum piston

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

connector, refer to page 8-30-52. 8-29-1 2 Series CXS Specifications 15 6 10 20 25 32 Bore size (mm) Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Bearing type Air (Non-lube) 1.05 MPa 0.7 MPa 0.1 MPa 0.05 MPa 0.15 MPa 10 to 60C (No freezing) 30 to 600 mm/s 30 to 700 mm/s 30 to 300

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

ms) Switch output Hysteresis Hysteresis mode Variable from 0*2 Window comparator mode Short circuit protection Yes Voltage output Output type Voltage output: 1 to 5 V Voltage output: 0.6 to 5 V Output impedance Approx. 1 k Output type Current output: 4 to 20 mA Current output: 2.4 to 20 mA Analog output Current output Load impedance Maximum load impedance at power supply voltage of 12 V: 300

99

2 m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

Suction Filter with Case FH99 Series

-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103 300 5.4 7.8 62 77 M10 x 1.5 Thread depth 12 10 118 360 9.7 13.5 90 102 M10 x 1.5 Thread depth 12 5 133 340 10.6 14.4 115 Note) Both flange and thread connections are supported.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

300 IRV Flow rate (L/min (ANR)) Inlet pressure (MPa) VEX ARP30(K) ARP30(K) Rc 3/8 SRH 0.50 0.25 SRP 0.45 0.40 SRF Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point VCHR 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVX 0.10 PVQ 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K) Rc 1/2 VEA 0.50

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

300 IR Flow rate (L/min (ANR)) Inlet pressure (MPa) IRV ARP30(K) ARP30(K) Rc 3/8 VEX 0.50 0.25 SRH 0.45 0.40 SRP Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point SRF 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVH 0.10 ITVX 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 PVQ Flow rate (L/min (ANR)) Inlet pressure (MPa) VY1 ARP40(K) ARP40(K) VBA VBAT Rc 1/2 0.50

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

300 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa)