Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

ZQ-OM01401

30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15 -40 -40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR)

ZSE F/ISE

Option Part no. 1 Bracket A ZS-24-A With 2 pcs. of mounting screws 1 Bracket D ZS-24-D With 2 pcs. of mounting screws 1 Panel mount ZS-24-E 1 ZS-24-F Panel mount + Front protection cover 16-2-28 5 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Specifications ZSE50F (Compound pressure) 100 to 100 kPa 100 to 100 kPa 500 kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (

MGP

PS 24 27 GR-S-010(10g 14 30 1216 30 1216 30 2025 100 3263 100 15 17-2.

High Purity Fluoropolymer

P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal

Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal

Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal

Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal

Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal

Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 0.05 0.02 0.01 0.005 0.002 Construction/Parts/Dimensions 50 100 200 500 1000 2000 5000 10 20 Port size Air flow (l/min (ANR)) Case (ZDC) Noise Level (Initial conditions) Hexagonal flats D (2507-006: Width

LX Series Compact Electric Actuators

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls . $lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales.

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20