AMF

40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 14-20-47 7 Series AMF Dimensions AMF801/901/800/900/1000 AMF801/901 ORIENTATION Label Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte Output MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte When configuration assembly fundtion is not used: Set to "0".

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override 150/30 m/s2 Shock/Vibration resistance (2) Dust proof Enclosure 12V, 24V DC and 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B or equivalent Coil insurance 1W DC (42mA), 0.5W DC (21mA

Refrigerated Air dryer Series IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

VCS

66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

Vacuum System Peripherals:

30 e Valve Model Fill in the blanks below with symbols of necessary specifications.

VCA

32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

Suction Filter with Case FH99 Series

(Including O-ring for element) FH FH With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N

Direct Solenoid

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

HEC_W-E

Tightening torque: HEC006--22 to 24 Nm HEC012--28 to 30 Nm Drain -12 to 14 Nm 3) A plug is mounted on DRAIN for recirculating fluid. When the piping for drain is connected, remove this plug beforehand. Be sure to arrange the piping on the drain to exhaust the constant temperature recirculating fluid in the unit at the maintenance.

NARM Series

(To set 36.3 Secondary (psig) Precautions 30 Be sure to read before handling.

VXP21/22/23

30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50 9 Series VXP21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Steam and Oil The VX series will be revised shortly.

Electromagnetic Digital Flow Switch

Magnetic flux density (B) 1 Flow Switch for Fluid Variations Rated flow range [L/min] Smallest settable increment Detection method Enclosure1 Display Applicable fluid Series 2 0 0.5 5 10 20 30 40 50 100 200 150 250 LFE 0.1 L/min 0.5 20 Water, Water-soluble coolant Electromagnetic IP65 3-color display 0.5 L/min 2.5 100 5 200 1 L/min PF3W 0.01 L/min 0.5 4 0.1 L/min 2 16 Water, Ethylene glycol

1

d 30 d (D) (C) (D) (C) H B H B Part no.

3 Port Solenoid Valve/

Note) Port size A B D E30003-A 3/8 31.8 30 30 E40004-A 1/2 31.8 36 36 Seal A (Spacer width) Note) in part numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. Separate interfaces are required for modular unit. Part no.

Air Catch Sensor

30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

VQ4000

, R2 port 31 31 : 3 position ( ): Rc3/8 1.11-6 Single Unit Series VQ4000 Base Mounted Plug Lead Grommet G H 2 position single: VQ415 l 0 1 155.5 155.5 105.5 42.5 23.5 23.5 50 105.5 42.5 50 11 (B port) 11 (A port) Indicator light (12.5) (12.5) SY 5 3 4 2 SYJ 9 38 48 A B 38 24.6 10.5 48 11 1 A SX 4 2 3 5 1 14 12 13.5 13.5 30 45 25.6 Mounting hole 30 45 VK Manual override 25.6 Mounting hole

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

60 10 40 60 L1 16 40 L2 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20 100 160 200 288 406 486 5620 7180 8255