VCC VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids
(70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Applicable Auto Switch Model Refer to p.5.3-2 to 5.3-75 for the detailed specifications of auto switches.
Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)
100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions Be sure to read before handling.
Max.120'F(50'C) 2position : 20 ms or less 3position : 50 ms or less (70 PSI) Operating pressute range Ambient and fluid temPerature Flesponse time Max.
Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.
Mounting: L (Foot), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 75mm, First Stroke: 70mm
Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 75mm, First Stroke: 70mm
Mounting: B (Through Hole), Bore Size: 32mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 70mm
Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 75mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Through Hole, Bore Size: 32mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Foot, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 75mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 56 46 3 75 65 4 94 84 5 113 103 6 132 122 7 151 141 8 170 160 9 189 179 10 208 198 11 227 217 12 246 236 13 265 255 14 284 274 15 303 293 16 322 312 17 341 331 18 360 350 19 379 369 L1 L2 L3 1416 A VK300 Series 3 Port Solenoid Valve Direct Operated Poppet Type Type 42 Manifold/Base Mounted (Side ported) VV3K3-42Stations -01
Gasket INLET OUTLET 277 ZFA Series Dimensions: ZFA 100 200 Single unit Bracket Cover opened-up dimensions 70 Element extracted dimensions 55 2 x 4.5 2 x Port size Note) The above diagram is for ZFA200. The bracket location shows L side.
24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35 H 44 48 51 54.5 LD 7 7 7 9 K 5 5.5 5.5 7.5 JD 30.5 25.5 28.5 23 H2 8 8 9 11 Bore (mm) 20 25 32 40 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 LZ 55 55 60 75
IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)
Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.