Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 70mm

Mounting: L (Foot), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 75mm, First Stroke: 70mm

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 75/70, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 75mm, First Stroke: 70mm

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 75/70, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 75mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 75mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

VK300

89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 56 46 3 75 65 4 94 84 5 113 103 6 132 122 7 151 141 8 170 160 9 189 179 10 208 198 11 227 217 12 246 236 13 265 255 14 284 274 15 303 293 16 322 312 17 341 331 18 360 350 19 379 369 L1 L2 L3 1416 A VK300 Series 3 Port Solenoid Valve Direct Operated Poppet Type Type 42 Manifold/Base Mounted (Side ported) VV3K3-42Stations -01

Air Suction Filter

Gasket INLET OUTLET 277 ZFA Series Dimensions: ZFA 100 200 Single unit Bracket Cover opened-up dimensions 70 Element extracted dimensions 55 2 x 4.5 2 x Port size Note) The above diagram is for ZFA200. The bracket location shows L side.

High Power Cylinder:

24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35 H 44 48 51 54.5 LD 7 7 7 9 K 5 5.5 5.5 7.5 JD 30.5 25.5 28.5 23 H2 8 8 9 11 Bore (mm) 20 25 32 40 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 LZ 55 55 60 75

ML2B

87 B 75 84 105 C D E F G H J Part no.

Ionizer Nozzle type IZN10 Series IZS

IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.

ML2B

87 B 75 84 105 C D E F G H J Part no.

240

NS 20 20 25 25 40 40 50 70 70 LT 64 64 74 74 84 84 94 104 114 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 27 MXH Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting Applicable auto switch model (mm) Number of auto switches mounted D-A9, A9V D-M9, M9V D-M9W, M9WV D-M9A, M9AV 1 pc. 2 pcs. 5 10 5 5 5 10 Auto Switch Proper

VK300

Non-locking) 4-Rc 1/8 (Lead wire length) 4-Rc 1/8 (P , R port) (P , R port) (Mounting hole) (Pitch) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) (Pitch) n-Rc 1/8 (A port) L Dimension n: Stations n L 1 37 27 2 56 46 3 75

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) 7 8 47.5 2-4.5 (Bracket mounting hole) 15.5 20 25 49 4 L3 7 7 L Dimension n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10 206 198 184

One-touch Fittings Series KQ2

KQ2W08-01S KQ2W08-02S 43.5 49.5 47 51 12 30 47 8 14 15.2 18.5 20.5 14.2 12 23 3 8 KQ2W08-03S 17 51.5 52.5 74 1 4 3 8 KQ2W10-02S KQ2W10-03S 56.5 58.5 59.5 61 66 17 10 76 18.5 21 23.8 33.5 26.5 17 1 2 KQ2W10-04S 65 66 145 68 78 22 1 4 3 8 KQ2W12-02S KQ2W12-03S 57.5 59.5 62 63.5 17 12 20.9 22 47.7 37.7 17 28.5 1 2 KQ2W12-04S 66 68.5 22 147 3 8 1 2 101 105 KQ2W16-03S KQ2W16-04S 26.5 22 69.5 75

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

65 51 4 94 84 70 5 113 103 89 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260 15 303 293 279 16 322 312 298 17 341 331 317 18 360 350 336 19 379 369 355 20 398 388 374 6 3 Port Direct Operated Poppet Series VKF300 Base Mounted Type Common SUP, Common EXH/Side Ported Type 42 Manifold Grommet: G DIN terminal

Suction cups with flange

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0