Digital Flow Switch Series PFA For Air Series PFW For Water

to 500l/min 10 50 11 21 51 Thread type Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Rc NPT G Nil N F 3m lead wire with connector Without lead wire Nil N Output specification Port size Size Applicable model Flow rate (l/min) Nil Output specification Applicable model Symbol 10 50 100 200 500 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 NPN open

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Shot Pin Cylinder

MPa pressure) Retract force 1764 N Extending force 2362 N M Mounting Based on NAAMS Standard (71 mm bore) Shot pin cylinder 15-E669 CKZP Series M Rod extended Deflection: 0.1 mm or less M Non-rotational accuracy 0.1 mm or less Lateral load F [N] Bore size Lateral load F Offset distance L Non-rotational accuracy Bore size Stroke [mm] 340 450 57 120 N 50 mm 0.1 mm 71 230 N 75 mm 57 25, 50

3

79.5 102.5 50 60 VXS24 1/2 29.5 69.5 67 61.5 55 110.5 63.5 79.5 109 50 63.5 VXS25 3/4 32 78 69.5 70 57.5 113 72 82 120.5 52.5 72 VXS26 1 32 81 69.5 72.5 57.5 113 74.5 82 126.5 52.5 74.5 Model Port size P 224 Zero Differential Pressure Type Pilot Operated 2 Port Solenoid Valve VXS Series For Steam Replacement Parts DIN Connector Part No.

High Vacuum L Type Valve

121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55

Series MXP Precision Air Slide Table

100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N)

Electric Actuators

75 100 125 150 175 200 Model Maximum speed (mm/s) Capacity Standard Deflection LXFHABC LXFHABD to 50 288 304 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 to 100 290 304 to 50 30W to 100 LXSHABC LXSHABD LXSHABC-B LXSHABD-B to 50 to 100 292 304 to 50 to 100 Features 4 Line-up of Products Line-up of Products Single Axis Electric Actuator Series LJ1 Series LJ1 LJ1H/High Rigidity Guide LJ1S

SZ3000

/location) Pilot port blocking disk: SZ3000-114-2A Supply/exhaust block assembly (8): SZ3000-50-2A-C8 Supply/exhaust block assembly (6): SZ3000-50-2A-C6 External pilot block assembly (6): SZ3000-54-2A-C6 External pilot block assembly (4): SZ3000-54-2A-C4 For SMC use only Enter the ordered part numbers. Part No. Quantity Part No. Quantity Order No. Clerk (code No.)

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Refer to back page 50 for Safety Instructions, pages 543 to 546 for Flow Control Equipment Precautions, and pages 573 to 575 for Specific Product Precautions. Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA

Single Axis Electric Actuator Series LJ1

Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA

Air Pilot Operated Series NVSA

A B c D E F H J K M N o P o R s 2.95 (75) 2.52 {64) o.75 {t 9) 2.24 157't 0.91 123l 't.06 {271 1.97 {50) 0.83 {211 0.94 124) 0.16 t4) 1.34 (34) (31) 0.55 114l o.12 {3) 0.47 112't 0.73 (18.6) 0.98 125) lrillimeters in Parenthes PARTS LIST NOTES 1 Sp.ing t AXB3& O-Fim f aRp56+!

VCC

VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31 0.5 to 2 0.5 to 2 10 10 20 G1/4 OUT port 0.5 to 2 0.5 to 2 20 G1/4 OUT port n-1 9 7 5 3 1 122.2 <124.2> 142.2 <144.2> 142.2 <144.2> 120 122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Air cylinder (Series compatible with secondary batteries)

Table 7 Auto Switch Mounting Height Auto switch model D-A9-900 D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center