SMC Corporation of America
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to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

Model S (Stroke) 4 7 8 8.5 13 RS Q G 46 80 92 98 149 RS H A 5 RZQ 4.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, 3-POSITION, ACTUATOR, RZQ 3-POSITION CYLINDER, PC, 63MM RZQ OTHERS (COMBO), .00000 lb

Item Selection item Symbol Page 219 VXS2 3 5 q A B Steam Can be used with heated water. Select the fluid. q 5 Step 2 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid. Item Selection item Symbol Size, Valve w 3 Size 3 Select from Flow rate Pressure.

Refer to 5. Pairing of wireless unit (Page 70) for the registration procedure. (1) (4) (2) (5) (3) (4-1) Registered Remote Details of the registered Remote.

. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter

Inch Sizes Metric Sizes * 1/4 3/8 1/2 5/8 4mm (5/32) 6mm 8mm (5/16) 10mm 12mm 0.7 11 13 15 04 06 08 10 12 Colors Color Red White Yellow Color Black Blue Green Natural Symbol B BU G N Symbol R W Y * * Coming soon Note: 4mm tubing is suitable for use with 5/32 SMC One-Touch fittings as are 8mm tubing and 5/16 fittings PEAPP08 8 (5/16) 5 38 PEAPP12 12 9 63.5 PEAPP66 6 4 31.8 PEAPP10 10 5 51

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

High rigidity direct acting guide 100 0.03 Ball screw 50 5 100 Features 3 Simplified Selection Flow Chart Series LX Page Standard stroke (mm) and Maximum speed (mm/s) 25 50 75 100 125 150 175 200 Model Standard CE marking Low particulate generation Deflection Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase 216 282 to 200 to 30 5 phase 210 304 294 5 phase 212 to 80 to 100 5 phase 214

to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100 LXPBABC

5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

to 50 (C) Ambient temperature 5 to 50 Lubrication Not possible (Initial lubricant: White vaseline is used.)

No. 1 2 3 4 5 6 Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note White White White Description Note No.

to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

UB 1t2 s/8n I 1 . 1 5 1.27 .281 112 't t4 3/4-'16 1.20 1 7 .312 1t2 318 3/416 '1.20 1.09 .408 112 3,/416 1.25 1.38 .408 5'l8 3/A 7/8-14 1.41 1.25 .408 518 718-14 t q o 1.36 .502 22 Tube To Male Pipe: ,15' ELBOW 1/4 1t8 7t16N .78 ,co .188 'lt4 1t4 7116-20 .75 .84 .188 5/16 118 112-20 . / c .65 .220 5/16 1t4 'U2-20 .75 .81 .220 g8 1t4 5/8.18 .89 .86 .283 U8 3i8 5/8-18 .91 .93 .283 3ri8 112

11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5 depth 3 10.05 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 depth 2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M

) / -62No.PS-OMU0002CN-D < -> 5[oPE] [LoC][UnL] [LoC] 5[oPE] [LoC][UnL] [UnL] /(64) [UnL] [FAL][LoC] -63No.PS-OMU0002CN-D / ( ) 1 (/30 ) -64No.PS-OMU0002CN-D (1015 ) -65No.PS-OMU0002CN-D ZSE20A(F)/ISE20A () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 () No.6 No.7 -66No.PS-OMU0002CN-D No.8 No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 [Er13