High Power Cylinder:

Composed effective area So (mm2) 6 2000 h=0.7 10 1/4, 3/8 7.5 2500 REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500

Cylinder with Lock Series MNB

38 245 10.5 11.5 M22 x 1.5 3/8 61 72 33 14 69.5 341 100 177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 1.27 mm 2.35 mm Connection type Screw tightening Rated current 4 A 8 A 9 A Rated voltage 60 V 600 V 250 V Contact resistance 5 mW or less Insulation resistance 100 MW or more Withstand voltage 1.0 kV 1.4 kV 4 kV Rating/Performance temperature Connector 25 to +90C 25 to +80C 25 to +85C Cable 25 to +80C 10 to +105C Ambient Min. bending radius (Fixed) 59 mm

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

CC

Compact hydraulic cylinder conforming to JIS Series CHKDB Nominal pressure (MPa) Bore size (mm) Stroke (mm) Action Fluid Series CHKDB CHKGB 20 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Compact hydraulic cylinder Series CHKGB 25 RE A B Hydraulic fluid 5, 10, 15, 20, 25, 30 35, 40, 45, 50, 75 32 Standard mineral hydraulic fluid W/O hydraulic fluid O/W hydraulic fluid REC Light and compact alminum

Rotary Table/

range Actuation range A B Rotation range m 190 40 10 20 10 1 2 3 7 20.9 22.8 24.4 28.7 16.9 18.8 20.4 24.7 A A 190 35 10 20 10 190 30 10 15 10 When D-F9 is used 190 25 10 15 10 Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

58 25 or less 33 or less VQZ2551lC Pressure center 25 or less 33 or less VQZ2551SlC VZ 9 8 7 6 5 4 3 2 1 Fully open Number of needle rotations (turns) 10 Note 1) Valve for sub-plate and maximum diameter.

Vacuum Unit

Release valve 23 Supply valve 11 Supply valve 21 22 10 stations 24 Release valve 10 stations Release valve 12 23 24 25 13 25 26 (+) () COM. 25 () () COM. 26 (+) (+) Positive common specification Positive common specification () Negative common specification () Negative common specification (*) The valve installed onto the product is non-polar type.

180

90 Seal kit MHY10-PS MHY16-PS MHY20-PS MHY25-PS <16, 20, 25> !7!8!9@0 MHY2-D MHY2-D2 MHY-A1001 MHY-A1601 MHY-A2001 MHY-A2501 Finger assembly ro MHY-A1001-2 MHY-A1601-2 MHY-A2001-2 MHY-A2501-2 <10, 16> e!2 Joint assembly MHY-A1002 MHY-A1602 MHY-A2002 MHY-A2502 <20, 25> e!2!3 <10> wy!1!4 Piston assembly MHY-A1003 MHY-A1603 MHY-A2003 MHY-A2503 <16, 20, 25> wy!1!4!

44

14 10 14 10 14 12 14 17 14 17 22 14 17 22 14 17 22 14 17 22 19 22 16.1 19.9 16.1 19.9 17.2 21 20.1 23.3 24.7 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 29.3 33.3 17.4 19.6 17.4 19.6 19.6 21.8 24.7 26.3 27.3 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 36.3 39 9 18 9 18 12 21 22 30 42 37 47 74 36 46 73 38 49 75 40 51 77 75 96 4 2.5 1.8 1.4 7 8 14.5 5 KG 4 3 2.3 2.3

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

, Ripple (p-p) 10% or less Current consumption 35 mA or less Protection Polarity protection Display accuracy 2% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

MGP

32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

CLK1

Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...) D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx.

ML2B

-X 20Data 10-13-6 10-13-7 5 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 How to Order ML2B 25 500 L Y7BW Number of auto switch Applicable counter/Controller Basic type Series CEU1 Series CEU5 Series CEU2 Nil S n 2 pcs. 1 pc. n pcs.

ML2B

-X 20Data 10-13-6 10-13-7 5 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 How to Order ML2B 25 500 L Y7BW Number of auto switch Applicable counter/Controller Basic type Series CEU1 Series CEU5 Series CEU2 Nil S n 2 pcs. 1 pc. n pcs.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN103-01 AN203-02 AN303-03 AN403-04 5-10-3 4 Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside