Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Digital Gap Checker

(Bracket for centralized lead wire) 28 46 14 16 16 20 19 8 (1.6) 5.5 6 12 22 60 48 2 x 3 6.5 2 x 3.4 4 19.2 2 x 5.5 2 20 ISA3 Series Error Indication Main screen Name Description Measures Supply rated pressure (100 kPa to 200 kPa).

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Air Catch Sensor

20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Series VCS

1 5 1 0 25 20 1 5 30 25 25 2.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1

switches S n 25 32 40 25mm 32mm 40mm 2 1 n Standard stroke Bore size (mm) Max. stroke (mm) Standard stroke* (mm) 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to

Large Bore Compact Cylinder Series CQ2

30 40 50 75 100 125 150 175 200 250 300 Reed switches: D-Z7, Z8 Solid state switches: D-Y5, Y6, Y7 Female threads Male threads 180 Single rod Double acting CQ2 200 Double rod New 180 and 200 Compact cylinder variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2

Compact manifold regulator ARM5 Series

0 0 50 100 200 250 150 300 VBA VBAT Flow rate L/min (ANR) Flow rate L/min (ANR) AP100 Pressure Characteristics (Representative Value) Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) ARM5BA-306 ARM5BA-306-1 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.25 0.25 0.20

PF-OMN0011_C

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

1 5 1 0 25 20 1 5 30 25 25 2.

30

R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11

0.01

0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 120 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 322 Clean Air Filter SFD Series Construction SFD100-C Component Parts Material No.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note) When a copper extension nozzle is ordered separately, a self-align fitting will also be required for connection with the blow gun.

PF-OMM0004_C

mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721 30 250 -79No.PF-OMM0004-D / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -80No.PF-OMM0004-D PF3W704/720/740/711 A AA B D E F G H J K L N P PF3W704 3/8 70 50 30 60 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W720

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

CY Graph (1) MG 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque

3 Port Solenoid Valve/

V 600 V Protection against electric shock Class II (EN60947-5-1: 2004) 20 VG342-X87 Symbols Safety limit switch Made by OMRON Symbol Pin Numbers (Built-in switch 2N.C.)

Magnetic Separator FHM Series

10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using