Digital Flow Switch

L Accumulated volume per pulse (Pulse width = 50 ms) Select from 100 L/pulse or 1000 L/pulse.

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage Configuration Note 2) VQ1000 VQ2000 1 2 3 4 5 6 VQ0 100V AC (50/60Hz) 2 position single 1 2 3 4 5 200V AC (50/60Hz) 2 position double (latching) 110V AC (50/60Hz) Electrical entry (2) (1) 3 position closed center 220V AC (50/60Hz) 24V DC 12V DC Grommet (Except for double (latching) and AC.)

CS1

72 8 48 105 M30 X 1.5 30 47 53.1 46 18 44 M30 X 1.5 Y-16 40 32 80 8 55 110 M36 X 1.5 34 46 63.5 55 21 53 M36 X 1.5 Y-18 50 40 100 8 70 125 M40 X 1.5 54 42.5 69.3 60 23 57 M40 X 1.5 Y-20 50 40 100 8 70 125 M45 X 1.5 54 42.5 80.8 70 27 67 M45 X 1.5 Y-25 9 86 160 81 63 50 126 M56 X 2 53 98.1 85 34 82 M56 X 2 Y-30 9 175 87 M64 X 2 66 105 80 63 160 95 38 92 M64 X 2 110.0 Use a single knuckle

MU

Calculation: (Example) MUL32-100 Basic weight0.42 (Foot style 32 equiv.) Additional weight0.16/50 stroke Stroke 100 stroke 0.42 + 100 / 50 x 0.16 = 0.74 kg CQ2 RQ MU Construction D-X 20Data A A section MU25 Replacement Parts: Seal Kit Component Parts Bore size (mm) Kit no. Contents Description Note No.

MU

, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

CNG

40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) 20 21 Series CNG Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

Electromagnetic Digital Flow Switch

aqueous solution Karman vortex IP65 3-color display 0.1 L/min 5 40 10 100 1 L/min 50 250 2 L/min PVC piping type 1 L/min 10 100 Water, Ethylene glycol aqueous solution IP65 3-color display Karman vortex 2 L/min 30 250 PF2D 0.05 L/min 0.4 4 Deionized water (pure water), Liquids which do not corrode nor erode fluoropolymer IP65 1-color display Karman vortex 0.1 L/min 1.8 20 4 40 0.5 L/min

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Compact and Lightweight

20 20 0 0 2 4 6 8 10 12 14 Supply pressure [MPa] 0 0 0 0 2 4 6 8 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH07SA ZH07LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 50 100 100 100 100 50 Vacuum pressure Suction flow rate [L/min

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m

Support Guide/11-LEFG Series

: S Step Motor (Servo/24 VDC) AC Servo Motor Servo Motor (24 VDC) LEC SS-T Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 LEC Y 11-LEFG16-S 11-LEFG25-S 11-LEFG32-S 11-LEFG40-S Motorless LAT LZ Weight LC3F2 Ball Screw Drive: S Step Motor (Servo/24 VDC) AC Servo Motor Servo Motor (24 VDC) Stroke [mm] Model 50 100 150 200 250 300 350 400 450

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 087 100 M10 x 1.25 Bore size (mm) 50 63 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 090 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200

Compact Cylinder with Air Cushion and Lock Series RLQ

RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90 95 100 110 120 145 170 100 105 110 120 130 155 180 120 130 140 165 190 125 135 145 170 195 Mounting bolt 8 C Spring washer D Note) When mounting 50 to 63 cylinders from the rod side, be sure to use the attached flat washers because the bearing surface is limited. 9 13.5 12.5

Best Pneumatics Vol. 14

ITV How to Order Switch Characteristics IC Contact point configuration Maximum contact point capacity Operating voltage: AC, DC 1a 2 VA(AC), 2 W(DC) 100 V or less 12 V to 24 VAC, DC : 50 mA 48 VAC, DC : 40 mA 100 VAC, DC : 20 mA Body size 30 IS1000M VBA Accessory Pressure switch VE Maximum operating current X201 Lead wire length: 3 m Regulating pressure range: 0.1 to 0.6 MPa 20 30 40 50 60

KJ

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

AC

50 7 7 14 14 80 80 4.5 4.5 50 50 Y40T Y50T 40 40 B410T B510T 24 12 4 70 10 15 100 6 62.5 Y60T 50 B610T Bracket For AF/AL For AFM/AFD For AR B340 B240 Mounting thread Model Applicable model A B C D F H J K L M N R t Bracket/ For AF, AL, AFM, AFD, and AR M4 X 8 l AF2000, AL2000 AFM2000, AFD2000 B240A 18 27 8.4 33 3 2.7 27 26 5.4 40 2.3 4.5 14 (Round head Phillips screw) Model File M4 X 8 l

Magnetically Coupled Rodless Cylinder

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance