MLGP

32 32 204 10 50 51 100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

1.63

= 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 10 10 25 25 25 25 25 25 20 20 20 20 20 20 MGJ JMGP 10 1 1 MGP 10 25 26 100 101 200 100 101 26 25 200 Stroke (mm) Stroke (mm) MGPW MGPW MGPWL32 to 63, MGPWA32 to 63 MGQ (23) L = 50 mm, V = 200 mm/s or less (24) L = 100 mm, V = 200 mm/s or less MGG 100 100 MGC MGF MGZ 50, 63 MGT 50, 63 50, 63 50, 63 50, 63 Load mass m (kg) Load mass

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

51

100 N JCM CDG3 L 100 M9BW N 25 C With auto switch CM2 With auto switch (Built-in magnet) CM3 Made to Order For details, refer to page 366.

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

ZPT/ZPX

121 12 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 +7 +228 22 How to Order ZPT 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) 40 50 63 80 100 125 M18 x 1.5 (40 to 80) 40 A18 50 M22 x 1.5 (100, 125) A22 63 80 Vacuum entry 100 B01 Rc 1/8 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 50 75 100 Large bellows pad N S U F E NBR Spring

ITV

Output deviation factor (% F.S.) 20 0.5 30 Set pressure (kPa) 40 0 50 60 0.5 70 80 90 1.0 100 80 60 40 20 50 100 150 Flow rate (l/min(ANR)) VAC side pressure (Supply pressure) (kPa) 14-8-31 32 Dimensions ITV2090 Note) Do not attempt to rotate the cable connector, as it does not turn.

Precision: B (Basic), Size: 20mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector), Number: 3 pcs.

Precision: A (High Precision Type), Size: 30mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector), Number: 3 pcs.

Precision: High Precision Type, Size: 30mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 3 pcs.

Precision: Basic, Size: 20mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 3 pcs.

AZ1000

psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) AZ1500 2000 to 3000 psig (13.8 to 20.7 MPa) 500 psgi (3.4 MPa) Inlet pressure: 1000 psig (6.9 MPa) 200 psig (1.4 MPa) 50 0.34 0.69 100 0.62 90 80 40 0.28 0.55 Delivery pressure (slpm) Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) 0.48 70 0.41 60 30 0.21 0.34 50 0.28 20 0.14

MHZ

100 150 Misc.

MHZ

0.3 MPa 0.3 MPa 200 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 0.6 MPa 0.6 MPa 80 0.5 MPa 0.5 MPa 60 0.4 MPa 0.3 MPa 0.4 MPa 0.3 MPa 40 0.2 MPa 0.2 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 12-2-6 6 Model Selection Series MHZ

air-filter-e

It does not mean that 100% of the particulates of the diameter shown can be filtered out.