REC M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150
258-9200-www.stevenengineering.com SOL.A 7 7 () (+) Blue None SOL.A SOL.B 20 20 () (+) Red White 7 stations SOL.B Stations are counted starting from the first station on the D side.
B6re_~i~e' Sl roke: ~~e ,:(n ;n;q) ." i\ i\L 0 8 B DC 0 E F FD FT FX FY FZ G " J V (mml M 14 x 1,5 145 160 143 157 43 43 19 19 14 20 190 212 100 230 125 )40 50 47 47 11 5 128 32 32 71 71 15 15 15 Upto 1000 : rs ,.: 50 ':liP to fP OO 11 2 255 M 14 x,:1,5' 160 Up to 1200 56 53 177 I 180 144 38 78.5 42 19 20 236 118 j 275 18 M1 6 x 1.5 15 40 141 'h stroke 267 (mm) With rod boot f h , ZZI Without
L L D D Min. bore M L Model 10.4 3 31.6 4 KK3P-04L 5.3 7.2 16 3.7 18 10 12.8 4.5 32.8 6 -06L 11.4 8.0 17 10.1 20 18.4 1/8 15.2 34 8 -08L 16.8 9.7 18.5 15.0 12 23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0 20.9 9 12 22
20 18 36 10 57.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 46 177.4 95 9 9 91 80 92 60 203 238 14 224 20 30 22 44 14 89.5 84.5 97 109.5 113 107 108 Dimensions for auto switch model D-F79W. 16 Series CEU Series
Dimensions: With Buffer ZP3P-T20PTSFJM-B5 ZP3P-T20PTSFKM-B5 Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 5 1.6 5 Width across flats 14 Width across flats 14 3 3 3 3 17 21 A D B 17 21 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across flats 14 20 2.5 20 2.5 1.6 Dimensions Dimensions Part no.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
(P.64) * 7 PLC DeviceNet LED LED PWR ALM MS NS DeviceNet (()) LED 8.LED (P.31) (JXC)LEDNSPLC PLC 20.P.80 PLC 10 - 8() ()() () 9 10.P.33 PLC 14.P.53 11 - 3 3.1.
M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5
2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-A -20/40(50 Hz) HRS150-A -20/40(60 Hz) 18 18 16 16 Ambient temperature 90F (32C) Cooling capacity [kW] Cooling capacity [kW] 14 14 Ambient temperature 90F (32C) 12 12 Ambient temperature 104F (40C
KAL23-M5 15 9.6 16 15.5 M5 X 0.8 M6 X 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 17.5 1 8 KAL23-M6 KAL23-U01 10 10 15.5 KAL04-M5 M5 X 0.8 M6 X 1.0 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 20 20.5 KAL04-U01 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 16 KAL06-M5 9 5 6 M5 X 0.8 M6 X 1.0 18 3.5 3.5 8 8 KAL06-M6 16.5 17 1 8 20 3 8 KAL06-U03 24 23 21.5 14 12.8 KAL06-U01 10 6 23.5
Nylon tubing L L D D Min. bore M L Model 10.4 3 31.6 4 KK3P-04L 5.3 7.2 16 3.7 18 10 12.8 4.5 32.8 6 -06L 11.4 8.0 17 10.1 20 18.4 1/8 15.2 34 8 -08L 16.8 9.7 18.5 15.0 12 23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0
Cleaning unit Note 2) Unit Standard unit (with gate valve) Part number (Mountable valve number) G06 G04 G02 02 04 06 08 10 12 14 16 18 20 40 U side (OUT port side) Stations Note 1) 4 5 2 3 1 Gate 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 Description/Model 2 port valve 2 port valve (Sliding type) VCC12-00 D side Valve options 2 port valve (Diaphragm type) VCC12D-00 Blanking
25 40 NC 14 21.3 32.4 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 LE 5 6 8 (LL) 40 49.6 75 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PC 4 9.4 8.5 PD 23 29.2 36 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 PA 44 63 113 PB 80 110 132 PE 1 3.4 0.5 R 5 8 12 RR 5.3 8.5 11 RW 69 100 116 SS 9.7 14 21.5 TT 12.5 19.3 35.4 NW 85.2 124.8 150.1 Q 140
20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.
A1 L1 R1 U1 NDH10 E1 MM NX Applicable bore size (mm) I-020B I-032B I-04A IA-04 A B C D E F M R Size Tolerance Note +0.027 0 +0.027 0 +0.027 0 +0.027 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 16 18 22 22 36 38 55 55 9 9 12 12 10 10 15.5 15.5 20 25 32 40 20 20 24 24 14 14 20 20 30 10 16 22 60 20 25 32 40 46 28 M8 x 1.25
T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W011 i i 2 6 WARNING !
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !