VQ5000

P R1 R2 18.4 18 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5600 1 2 position double: VQ5200 1 3 position closed center: VQ5300 1 3 position exhaust center: VQ5400 1 3 position pressure center:VQ5500 1 Indicator light Indicator light 214 121.8 195(200.5) 2 2 91.5 59.5 105.8 (A port)17.5 13.5 (B port) 73(

High Vacuum L Type Valve

Heater specifications Item XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

3

1 !2 q w e r t y !1 !0 o i u Component Parts No.

240

1 t !

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

Compact Cylinder with Solenoid Valve/

40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4 7.5 M6 x 1 32 29.7 8 50 6.6 M8 x 1.25 50 0.2 46 10 to 100 77 74 59.6 7.5 M6 x 1 38.5 35.4 8 60 9 M10 x 1.5 54 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will be the same

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3. Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1.

PS-OMH0005CN

-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2

MK

1 !2 !3 25, 25: 2 Qty.

ASD

ASD430F-N02-07S 17 13.2 43.9 25.6 55 18 AK 5/16" NPT1/4 ASD430F-N02-09S 18.5 15.2 46.5 28.2 36.7 41.7 34.6 17.5 40.4 29.6 35.4 18.5 15 11 19.7 3/8" ASD430F-N02-11S 62 21 18.5 49.3 31 ASS 1/4" ASD530F-N02-07S 17 13.2 48.7 25.6 20.3 76 5/16" NPT1/4 ASD530F-N02-09S 43 18.5 15.2 51.3 28.2 41.9 48.8 38 43.8 15.4 46.9 19 23 19.8 23.1 3/8" 84 ASD530F-N02-11S 21 18.5 54.1 32.6 1/4" ASD530F-N03-07S

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Suction cups with flange

TQ1230001-OM107 1. Parts included in the package Cup mounting flange 1 pc. Parallel pin (6x10): 1 pc. Hexagon socket head cap screw (M6x10): 4 pcs. Suction cup with adapter: 4 pcs. Plug: 1 pc. Plug: 4 pcs. Part No. M-5P Part No. M-3P When Rc1/8 port use as vacuum pressure supply port. Used for decreasing the number of (Mount to unused port.) suction cups. -4No. TQ1230001-OM107 2.

Modular Type Filter Regulator Series AW

66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71 through 74 55 Filter Regulator AW10 to 40 Integrated filter and regulator units

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

10

adjustment: F Width across flats: C 14 7.5 7 M10 x 1 MHL2-25D1Z-X28 17 15 18 M10 x 1.5 MHL2-25D2Z-X28 15 18 Width across flats: D Symbol Without Magnet -X50 4 Specifications How to Order Magnet None Standard model no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17