EXxx-OMW0014CN

-SPN3A, . 3-113-12 MDI/MDI-X (FSU) . 3-11 2 MDI MDI-X RJ45 M12 RJ45 M12 TD++ 1 1 1 1 RD++ RD++ 3 2 3 2 TD++ TD-2 3 2 3 RD-+ RD-6 4 6 4 TD-MDI MDI RJ45 M12 RJ45 M12 TD++ 1 1 1 1 TD++ RD++ 3 2 3 2 RD++ TD-2 3 2 3 TD-RD-6 4 6 4 RD-+ MDI-X MDI-X RJ45 M12 RJ45 M12 RD++ 1 1 1 1 RD++ TD++ 3 2 3 2 TD++ RD-2 3 2 3 RD-TD6 4 6 4 TD. 3-11 20 No.EX-OMW0014CN-A 1 IO OFF EX245-SPN2A/SPN3A (FSU

Vacuum Unit

1/2 digit, 7-segment LED, 1-color display (Red) Display accuracy 2% F.S. 1 digit (Ambient temperature at 25 3C) Indicator light Lights up when output is turned ON.

VM

1 !2 NBR NBR !3 !

CEx-OMQ0011

( ) f. g.( ) h. i. j. k. l. 4. 4. 4. 4. 5. 5. 5. 5. 6. 6. 6. 6. 7. 7. 7. 7. 2. 2. 2. 2. 8. 8. 8. 8. ,, 1. 1. 1. 1. 9. 9. 9. 9. 2. 2. 2. 2. - 10. 11. ( )70% ( )35% 1. 1. 1. 1. 1. 1. 1. 1. 2. 2. 2. 2. 3 1. 1. 1. 1. 0.10.8MPa 0.30.5MPa :560 3. 3. 3. 3. ( ( ( ( ) ) ) ) 2. 2. 2. 2. 35% ) 1. 1. 1. 1. 5 2. 2. 2. 2. - 1. 1. 1. 1. 1. 1. 1. 1. ( ( ( ( 6 6 6 6 ) ) ) ) 2. 2. 2. 2. 3. 3. 3. 3. 2

Solid State Auto Switches

Grommet (Perpendicular) S99V1/2, T99V1/2 2-color indication Tie-rod mounting style Diagnostic output Water resistant With timer 1626 With Pre-wired Connector Connector Pin Arrangement Color distinction of lead wire Meaning of contact number Sensor type 1 pin 2 pin 3 pin 4 pin 1 pin 2 pin 3 pin 4 pin OUT () DC 2-wire type Brown OUT (+) Blue OUT () OUT ( ) DC 2-wire, Non-polar type Blue Brown

70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

IDX-OM-W029

2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-4 . 6-3 6-5 . 6-5 7 C 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 M 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-

Stopper Cylinder

2 20 20 10 10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

HRL

Ex. 1 Ex. 2 Ex. 3 Remote operation switch Output 1 Low flow switch flow signal Circulating fluid temperature setting Output 2 Input 2 Input 1 Users equipment Start and stop Output 3 Outputs 4 to 6 HRL Circulating fluid discharge temperature Output examples Output 1 : Operation status (start, stop, etc.)

Integrated Controller

Wiring diagram (NPN) Wiring diagram (PNP) Power supply 24 VDC Power supply 24 VDC Parallel I/O connector Parallel I/O connector IN0 1 IN0 1 IN1 IN1 2 2 RESET RESET 3 3 (Unused) Not connected (Unused) Not connected 4 4 Load Load OUT0 OUT0 5 5 Load Load OUT1 OUT1 6 6 Load Load OUT2 OUT2 7 7 Load Load ALARM ALARM 8 8 Power supply connector Power supply connector C24V 1 C24V 1 M24V M24V 2 2 GND

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 2 DI1 CN1-23 DI2 DI1 DI0 Program method DI-1 0 0 0 Program No. 1 0 0 1 Program No. 2 0 1 0 Program No. 3 0 1 1 Program No. 4 1 0 0 Program No. 5 Point table No.

Rotary Table/

4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

MY2

6 Single axis type/MY2H w @2 t @1 @9 #8 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Compact

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

EXxx-OMN0029CN

() EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYE1 (24 ) 0 3 EX600-DYF (16 ) 0 2 EX600-DME (8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -59No.EX-OMN0029CN-D SI ([ ](20 )) 0 0 byte 1 4 byte 2 (10 ) 6 byte (64 ) 12 byte 3

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.