5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

SYA3000/5000/7000

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 71.1 18.6 57 4 2 x M5 x 0.8 (Pilot port) 61 42 B A PE 38 46 B A Manual override P EB EA 2 x 4.3 (For mounting) 21 69 28.6 109.7 SYA SYJA VZA VFA VFRA 26.5 2 x 1.8 (Ventilation hole) VA 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1743

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 :

MGG

4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

5 3 position closed center/exhaust center/pressure center SYA5 20(-F2) C4, N3 C6, N7 C8, N9 3 4 5 1/8 (A, B port) 2-M5 x 8 (Pilot port) 2 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" 2 3.2 (For mounting) Manual override (Non-locking) 1.8 (Ventilation hole) 2 2.2 die-cast hole (For manifold gasket positioning) 1/8 (P , EA, EB

RSQ

RSQB12-10 Bore size: 12 RE A B Auto switch Minimum lead wire bending radius 10 2-7.5 counterbore depth 4 2-M5 x 0.8 REC Stroke 5 18.5 4-3.5 through 15.50.2 4-6.5 counterbore depth 4 32 Flat washer 4 parts CX 8 14 SMC CY 2-M4 x 0.7 effective depth 7 7 7.5 15.5 0.2 4-M4 x 0.7 effective depth 7 15.5 0.2 0.5 Mounting bolt for rod cover 2 parts MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U A 38.2 Auto switch mounting positions Auto switch mounting height (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL U D-C7 D-C8 D-C73C D-C80 Auto switch model D-H7W D-H7F D-H7BAL D-H7 D-H7C D-C73C D-C80C D-H7C Bore size (mm) A B A B A B U U 40 22.0 26.0 21.0 25.0 19.5 23.5 35.0 38.0 37.5 50 30.0 18 29.0 17.0 27.5 15.5 40.5 43.5 43.0 26 Series RSDG Auto Switch Internal Circuits Lead wire colors inside

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W A B B B B B B A A A A A Hs Hs Hs Hs 20 25 32 40 50 63 80 100 35 Series MGG Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock Type: With Rod End Lock A B 8.5 Hs 11.5 16 Auto switch D-C7/C8 D-H7 A B 12 Hs 14.5 Courtesy of Steven Engineering

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C8 C4 C6 C8 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16 210.5 200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5Y5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5

CL

J CD GD AL D GL A E GR B F H1 BN GA B1 W/o rod boot W/ rod boot 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 40 50 63 80 100 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 22 27 27 32 41 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 15 18 25 31.5 35.5 15 17 17 21 21 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 x 1.75 44 52 64 78 92 26 27 26 30 31

CM2

1() 1() 2(0) 7 B 0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3) L2 L1 2 P = 20 P = 20 19.5 1 23 9 Courtesy of Steven

CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

1.90 C8 1.80 0.16 0.23 0.45 0.44 SS5Y5-42 2 to 20 (1) 1/4 1.90 C8 1.90 0.12 0.20 0.43 0.46 Valve stations Location SS5Y7-42 1/4 3.00 C10 3.00 0.12 0.25 0.66 0.75 Base 4/2 (A/B) Porting spec.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet (G) 24.5Mounting holes (5.5) 30 (7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2 A 2 Manual override 5 SY SMC 4 (L4) (L3) SYJ L2 L1 P=16 P=16

5 Port Solenoid Valve Series SQ1000/2000

A A B A B A B A B A B A B 122.3 4 A SMC 53.6 2 B 37.6 18.5 Approx. 12 Approx. 12 EXH. outlet Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

5 Port Solenoid Valve Series SV

14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Model 4, 2 (A/B) 1, 5, 3 (P/EA/EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-16 C8 0.89 0.22 0.23 0.22 0.21 0.98 C8 SS5V2-16 C10 2.3 0.50 0.56 0.28 0.18 2.7 Note) Value is for manifold base with 5 stations and individually operated 2 position type.

SZ3000

16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U Side D Side 3.1 8 36.3 43.7 5.5 (DIN rail dimension) 35 18 28.8 DIN rail holding screw Manual override In case