Process Valve Series VNA

Note 3) Vacuum pilot type CE compliant pilot solenoid valves will become VO307V--Q. 367 Series VNB How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type SF4 5 D 23 Q VO307 Q CE compliant CE compliant SF4 5 D 23 VO301 00 * Electrical entry: D or DZ only * Electrical entry: D or DZ only Body option With surge voltage suppressor Standard Vacuum pilot Nil

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No. Note Note Description Material Description Material 40 to 63 Wear ring Resin Aluminum alloy Cylinder body q !8 CE2 12 to 20 Carbon steel Brass Rod end nut !

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Angle Seat Valve

In the case of liquid: P Q = 1.9 x 106 Av .(9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] P : Pressure differential [MPa] G : Specific gravity [water = 1] In the case of saturated steam: Q = 8.3 x 106 Av P (P2 + 0.1) .(10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] P : Pressure differential [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 11 Solenoid

Angle Seat Valve /

In the case of liquids: DP Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av DP(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 11

CM2

NT-02 NT-03 NT-04 13 5 15.0 12.5 M8 x 1.25 17 6 19.6 16.5 M10 x 1.25 22 8 25.4 21.0 M14 x 1.5 Mounting Nut Applicable pin part no. Part no.

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CM2

B H C D d NT-02 NT-03 NT-04 M8 X 1.25 13 5 15.0 12.5 CJP M10 X 1.25 17 6 19.6 16.5 M14 X 1.5 22 8 25.4 21.0 CJ2 Mounting Nut (mm) CM2 Material: Carbon steel C85 Applicable pin part No. Part No.

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

MQQ

2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MNB

9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Flow Control Equipment

AS43l1F-04 R(PT)1/2 Note 1) Only elbow style.

10

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 414 Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod MBKW Series Standard Basic: (B) Cushion valve Port W V G 2 x Rc P G Width across flats KB Q E CJ1 CJP E D MM MM E KA B C CJ2 Section Q-Q Q JCM Width across flats B1 H1 A AL F H N MA MB Width across flats B1 ZZ + 2 x Stroke S + Stroke N F H + Stroke A AL H1 CM2 2 x 4

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VFRA4211-03 VFRA4211-04 VFRA4311-03 VFRA4311-04 VFRA4411-03 VFRA4411-04 VFRA4511-03 VFRA4511-04 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 13 15 14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/8 3 position

Digital Flow Switch (Manifold type)

Nil S P W 0.5 to 4 L/min (Symbol 04) 0.50 0.49 0.50 0.48 2 to 16 L/min (Symbol 20) 1.79 1.21 1.38 1.05 5 to 40 L/min (Symbol 40) 4.57 3.11 2.42 2.04 Flow range: 0.5 to 4 L/min (symbol 04) Flow range: 2 to 16 L/min (symbol 20) Flow range: 5 to 40 L/min (symbol 40) -52No.PF-OMW0004-B Flow rate characteristics for several supply units Flow range: 0.5 to 4 L/min (symbol 04) (reference value)