MB

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) Bore size (mm) S ZZ S ZZ Model without air cushion is designed to include rubber bumpers.

VQ4000

(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked

SZ3000

CompoBus/D compatible Q Pilot specifications OMRON Corporation: CompoBus/S (16 points) compatible R1 Internal pilot specifications Nil R External pilot specifications OMRON Corporation: CompoBus/S (8 points) compatible R2 Mitsubishi Electric Corp.: CC-Link compatible V Supply/Exhaust block mounting position O Without SI unit U D B M U Side (2 to 10 stations) D Side (2 to 10 stations) Both

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Enclosure: IP65 Leakage Select from 2 Piping Directions. 1 x 10-10 Pam3/s Rear ported Bottom ported 1 x 10-5 Pam3/s R, Rc, NPT, G)> Applicable Fluid Examples Welded structure for sensor units and fitting parts Select from a face seal or compression fitting.

RSQ

16 20 Bore size: 16, 20 E S 4-O counterbore 2-N through MK(2) X F Stroke Q 2-P Y RS Q G RS H A G D T RZQ U W V L M MI W S 10 (11) 20 (22) H + Stroke B + Stroke A + 2 stroke Workpiece transfer direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore

Flow Control Equipment

With ASV310F/E410F/E510F S 1 2 Tee Elbow (1) P Flame resistant resin body as standard. Applicable tube O.D. (1) "Eibow": M3, M5 only (UL standard V-0) 4 6 8 10 12 04 06 08 10 12 Built-in One-touch fittings Applicable model: ASV310F, ASV410F, Port size ASV510F M3 X 0.5 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)3/8 R(PT)1/2 M3 M5 01 02 03 04 P Brass parts are all electroless nickel plated.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

R.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Vacuum Pad: Ball Joint Type

13 40 2 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 32 35 13 16 29.8 47 ZPR32F-0-B8 M8 x 1.25 Q: 4 Q: 6 Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 10.4 21.6 (mm) Q: 6 Q: 8 Pad diameter (mm) ZPR F-0-B8 (Without buffer/Female thread) 40 50 R 24.3 R S 15.2 S 20 to 32 12.8 26.2 S Hexagon

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

Refrigerated Air Dryers

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) The combination of K, L and M is not possible because an auto drain can only be attached to a single option. *2 The maximum operating pressure is 1.6 MPa. *3 Voltage symbol 20 (200 VAC) is the terminal block connection as standard. The Option S cannot be chosen.

53

20 s Max.

MVGQ

port (with plug) 4-MM depth ML Solenoid valve: Series VZ5000 4-NN through Speed controller RS Q G RS H A RZQ Rc 1/8 P port MI W S CEP1 CE1 CE2 Rc 1/8 R port C + Stroke B + Stroke A + Stroke ML2B C J G5-S MVGQM, MVGQL Common Dimensions CV Applicable solenoid valve B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) MVGQ 40 124 38 M8 x 1.25 20 M8 x 1.25

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

2/3 Port Valve

(No need to add options "S" and "L".)

Prevents Micro-Bubbles

S) C 2-Q Breathing port: R H G SMC SMC SMC SMC N V 1/4 1/4 1/4 U 3/8 E Pitch = B Dimensions (mm) Station n-A port 2 3 4 5 Model Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 LLC2A 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 (mm) Dimensions 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109 156