MTS -9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.
30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.
For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet
50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.
300 300 300 20 25 32 M5 x 0.8 M5 x 0.8 9.5 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30
300 300 300 20 25 32 M5 x 0.8 M5 x 0.8 9.5 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30
side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5)
812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573
Tightening torque: 0.18 to 0.25Nm 1.13-5 Series VQD1000 Dimensions L plug connector: VQD1121l-lL-M5 M plug connector: VQD1121l-lM-M5 Lead wire length: 300mm 2-M5 X 0.8 (A, B port) Direct manual override Light 0.5 0.5 4 11 2 (11) 5.5 15 0.6 0.6 5.3 5.3 13 34 33 29 25.5 6 3 21.5 4 2-3.5 Mounting hole 28.5 49 50.5 2-M5 X 0.7 (P, R port) 3 1 (R) (P) 7.4 3 (13) 1.13-6 Series VQD1000 Dimenisons
2 x 9 counterbore M5 x 0.8 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x M6 x 1.0 effective depth 10 Note 2) 2 x 5.4 through 47 25.5 10 36 1 Flat washer 8 10 7 7 25.5 39.5 + Stroke 4.5 36 44 + Stroke Lead wire minimum bending radius 10 Auto switch 25 19 5.5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth
-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.
5.5 M3 x 0.5 8 L 12 7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214
of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,
8 4 x M5 x 0.8 Depth 11 2 x M5 x 0.8 Cylinder port MXJ 4 x M5 x 0.8 Depth 8 6.5 34 6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.
4-M4 X 0.7 Depth 5 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) MHQ Auto switch mounting groove position MHL2 MHR O 41 30 18 12 S MHK 4 4 5 MHS M5 X 0.8 (Finger opening port) 20 9 6.45 MHC2 6 MHT2 MHW2-20D1 MHY2 Right angle finger MHW2 MRHQ Auto switch 31 15 10 11 14 5 28 16 4-M4 X 0.7 (Thread for mounting attachment) 41 MHW2-20D.SMHW2, #1 MHW2-20D1.SMHW2, #6 2.8-19 Series
x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13
Drain discharge With differential pressure type auto drain IN OUT 9 24 140 97.5 120.5 8.5 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain 5.5 (Maintenance space 100mm or more) With fittings for purge air discharge (Option: P) Purge air discharge tubing port for dew point indicator Applicable tube O.D.: 8 (196) Dew point indicator (Option: PS) (73) 45 11 IN OUT (177) 120.5 (64)
M5 thread With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings M5 thread 2(B) (A)4 Side ported 5 (R1)5 1 (P) 3(R2) Note) For double solenoid specification, the function symbol below is D.
hole M5 x 0.8 [4 (A), 2 (B) port] 9.3 27.8 17.8 20.3 20.3 4A 2B P P P 55.5 4A 2B 4A 2B 4A 2B 4A 2B 4A 2B 34 17 6 10 8.2 (Not used.) 5 2 x 5.5 (For mounting) (Pitch) P=27.5 23.5 1/8 [4 (A), 2 (B) port] (Station 1) (Station n) 1/8 [Pilot port: Lateral (-P)] 61.5 43 25 EB EA EB EA 11 M5 x 0.8 [5 (EA), 3 (EB) port] 18 (Pitch) P=27.5 Dimensions (Common to Type 30 and Type 31) n: Stations 20 11
B 23 () (+) Grey Red 11 () (+) White Red SOL. A Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL. B 25 () (+) White None COM. 13 (+) () Orange Red Note) Negative COM. spec. Positive COM. spec. Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM.