Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 4

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: E (Vacuum Break Flow Adjusting Needle, Screwdriver Operation

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 4 (ø1.5), 1st Selection Supply Valve and

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation Type

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation Type), 1st Nominal

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: BD (with Manifold Options B & D), Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation

Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: BD (with Manifold Options B & D), Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: JK (with Unit Options J & K), 1st Nominal Nozzle Size: 0 (for

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: without Option, 1st Nominal Nozzle Size: 4 (ø1.5), 1st Selection Supply Valve and Release Valve

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 3 (ø1.2), 1st Selection Supply Valve and

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: E (Vacuum Break Flow Adjusting Needle, Screwdriver Operation Type Long Lock

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 3 (ø1.2), 1st Selection

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: J (Vacuum Break Flow Adjusting Needle, Round

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver

IDX-OM-X011

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev ANobember,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

IDX-OM-Y002

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev AApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

VFR5000-OMN0001

Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04

VFRA3000, 4000 Series

For 3-position exhaust center valve or single acting cylinder, take appropriate measures to prevent malfunction by using it with an individual EXH spacer assembly (VVFS3000-R-03-1,2 / VVFS4000-R-04-1,2). 5.