SMC Pneumatic Clean Series 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.
55 55 57.5 57.5 57.5 99.5 38 47.5 46 47 52 50.5 51.5 68.5 71 71 71 73.5 73.5 73.5 78.5 88.5 87 90 93 91.5 94.5 102 102 102 104.5 104.5 104.5 2 3 12 Direct Operated 2 Port Solenoid Valve Series VXN Air Air Medium vacuum Medium vacuum Oil Water Dimensions/Body Material: C37, Stainless Steel mm VXN Conduit Faston type Specifications Specifications For Air/ D z 280 Q F 11 Q F D 23 G1/2 Water
24 31 24 55 24 31 64 72 Y-G10 22 32 100 79 Knuckle pin and snap ring are included.
24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.
Refer to page 8-30-55 for the details.
end nut 43.5 ML1C Rear flange style: RLQG63 D-X 60 80 204-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Data Rod end nut 43.5 4-M8 x 1.25 Cap bolt 8 Double clevis style: RLQD63 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 9-12-17 18 Series RLQ Dimensions: Cylinder with Bypass Piping RLQB32-B RLQB32-F Extension locking, Right-hand
Refer to page 8-30-55 for the details.
Refer to page 8-30-55 for the details.
) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55) 32 32 (47) 0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48
IN OUT How To Order B VHS 30 N 02 Z X513 EXH Residual Pressure Relief 3 Port Valve Dimensions mm With External Epoxy Coating, Stainless Fasteners B C D E F G H I Model A Body Size Symbol 20 30 40 VHS20 VHS30 VHS40 59 78 107 20 29 39 40 53 70 34 46 63 22 45 55 58 33 42 44 28 30 36 45 55 63 Applicable Model AC21 AC31 AC41 Name Plate In Imperial Units (PSI, F) Caution Thread Type N NPT If
7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20 25 32 40 M5 x 0.8 21.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55
37.5 70 65.5 50 54 54 8.5 10 .5 70 2.3 52.5 NAR5000 90 168 48 90 75.5 70 66 65.8 11 13 90 3.2 52.5 NAR6000 95 204.5 48 95 78 70 66 65.8 11 13 90 3.2 D I M E N S I O N S NAR2001 ~ NAR4001 Bracket Port Size Model Part Size A B C D E Bracket Dimensions N F G H J K L M NAR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 NAR25O1 1/4 3/8 53 102.5 25 48 32 30 34 34 44 5.4 15.4 55 2.3
7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20 25 32 40 21.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55
for deflection data. 8 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PA Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 4-M6 x 1 thread depth 15 67 20 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55
113 4-11 9 16.2 9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25 Cap bolt Double clevis/RLQD63 8 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod
(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95
SET1~3[SEt] [SEt]()[P_1][n_1]() () UPDOWNSET()(55) UP DOWN SET (delay)( )(55 ) UP DOWN ON/OFF 0.01[sec.]0.0060.00[sec.]
NN S 50 63 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.