Stations: 06, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option
Stations: 06, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/
Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes]
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature
Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.
Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated
Stations: 05 (5 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 04 (4 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes]
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes]
Valve; Stop Valve: None), Return Port Size: 06 (3/4), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)
Valve; w/Stop Valve), Return Port Size: 06 (3/4), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link
Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L