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Fixing method for protective covers WRF100-T200 WRF100-S200 WRF100-T240 WRF100-S240 WRF100-T270 WRF-C200 WRF-C240 w WRF-C270 Tightening torque for cover mounting bolts Location Tightening torque (N.m) t r e r y 3.0 to 4.0 5.0 to 7.0 1. q Mount the cover L (q) and cover R (w) on the cylinder body. Mount the cover L (q) on the side where a limit switch is mounted.

D-J51: 5ms or less MHZ2 Lead Wire Length MHZJ2 How to specify lead wire length MHQ (Example) MHL2 L D-A73 MHR Lead wire length 0.5m 3m L 5m Z N MHK MHS None Applicable to only connector type switch D-C MHC2 Note 1) Lead wire length Z: 5m Applicable to Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73 (C) (H)/A80C MHT2 Solid state switch: Made to order (Except D-F9, F9lV, F7lWV) D-A53/A54, D-Z73

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

PF2W740 PF2W711 Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 2 to 16 l/min 0.5 to 4 l/min 5 to 40 l/min 10 to 100 l/min 0.1 l/min 0.05 l/min 0.5 l/min 1 l/min 0.1 l/pulse 0.05 l/pulse 0.5 l/pulse

RS Q G RS H A Stroke reading cylinder with brake (CE2) Extension cable RZQ Sensor cord Head side cylinder port Rod side cylinder port Controller: Series CEU2 MI W S External equipment (PLC, etc.)

I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l /min (ANR)) ZL ZR1-W13L1 ZR1-W20L1 ZY Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) ZQ

L [mm] Eccentric distance L [mm] MGPKL32 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 1 0.1 1 10 100 100 10 Eccentric distance L [mm] Eccentric distance L [mm] 16 MGPK Series L L Plate Material Carbon Steel /MGPKL Horizontal Mounting m m MGPKL16 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load

73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l 141+l 147+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.

'*d vtti-i --l Blb_r!s4n;i-i ;-. l q i +@i q. i +qei ")ftt--*9::l:1.i-: R"dffi.:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult. Us trls box tor inductiv bads, 5 rnlers or rlpre ol lead wiras, or 1 00, 200VAC aoolicatons, 0npul @'d) AND (Serial), OR (Parallel) connection example AND connction for 3-wir syslsm NPN outM "D"r e\r oh i!

'*d vtti-i --l Blb_r!s4n;i-i ;-. l q i +@i q. i +qei ")ftt--*9::l:1.i-: R"dffi.:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult. Us trls box tor inductiv bads, 5 rnlers or rlpre ol lead wiras, or 1 00, 200VAC aoolicatons, 0npul @'d) AND (Serial), OR (Parallel) connection example AND connction for 3-wir syslsm NPN outM "D"r e\r oh i!

J Dimensions D D-A3lC D-A44C -X 20Technical Data Operation Range ( l Dimension) Dimensions (mm) Bore size (mm) Bore size (mm) 40 Switch part No.

type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1

L/min Accumulated pulse flow rate exchange 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse value (Pulse width: 50ms) Note 1) Note 2) Real-time flow rate L/min, gal (US)/min Display units Accumulated flow L, gal (US) Accumulated flow range Note 1) 0 to 9 L 2.5% F.S.

O e b u t ) h c n i ( . n i M e l o h . a i D . t W ) f g ( . o N t r a P D L Q M 4 / 1 0 0 7 0 L R K 8 6 . 0 ) 2 . 7 1 ( 9 8 . 0 ) 5 . 2 2 ( 1 2 . 0 ) 3 . 5 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 8 / 3 0 0 1 1 L R K 9 8 . 0 ) 7 . 2 2 ( 0 1 . 1 ) 8 2 ( 6 2 . 0 ) 6 . 6 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 6 1 2 / 1 0 0 3 1 L R K 4 0 . 1 ) 5 . 6 2 ( 2 2 . 1 ) 1 3 ( 1 3 . 0 ) 8 . 7 ( 4 9 . 0 ) 4

AP100 (13) Working principle When the MR units OUT side pressure is applied to piston q , piston q moves until it balances with the force of pressure adjustment spring w . The movement of piston q is detected by switch assembly e and outputs ON and OFF signals.