High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Applicable tubing size Class LQ1, LQ2 1 2 3 4 5 6 Class LQ1, LQ2 1 2 3 4 5 6 Symbol LQ1 LQ1 Connection tubing size Connection tubing size Symbol LQ1 LQ1 Applicable fitting Metric sizes 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Inch sizes 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Symbol 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Material VXA Body Diaphragm Note Actuator section End plate Symbol Applicable tubing size PFA PPS PTFE Nil VN Body class Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes LVC 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type LVA Symbol Thread type 4 one-touch fitting 6 one-touch fitting M5 x 0.8 Body class 1 2, 3,

LVQ

Pilot port thread type Symbol Symbol Nil Application Ports A & B same size 2 3 4 6 5 Nil M R N Connection tubing O.D. 1/8" (3) Connection tubing O.D. 4 Rc 1/8 NP T1/8 LQ1 integral fitting LQ1 integral fitting Threaded Threaded LVC Metric sizes 04 06 08 10 12 19 25 4 6 8 10 12 19 25 Different diameter tubings can be selected within the same body class.

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

3 Port Solenoid Valve

SS07 3 M01 08 C Body Ported Manifold Stacking type SS073M01-04C 1 set Manifold Base no. Valve no. S070M-5BG-32 4 set Ports 3 port 3 Prefix the symbol to the solenoid valve part number. Port size Write sequentially from the 1st station on the D side.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

./ Port size Connection A10 A14 Symbol B5 M5 x 0.8 Female thread Pad type Vacuum entry B01 Rc 1/8 F Ball joint type 04 4 tube One-touch fitting 06 6 tube 08 8 tube Material N NBR S Silicon rubber Buffer stroke U Urethane rubber Symbol Stroke Pad dia.

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 32 (ø32), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: BG02 (G1/4, Direct Mounting, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 32 (ø32), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG01 (G1/8, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 32 (ø32), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG02 (G1/4, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG02 (G1/4, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: BG02 (G1/4, Direct Mounting, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG03 (G3/8, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG01 (G1/8, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG02 (G1/4, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG03 (G3/8, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: BG02 (G1/4, Direct Mounting, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: AG01 (G1/8, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø32, Stage: 2.5 Stage, Guide Attachment: w/Mesh Attachment, Connection Thread: G1/4, Direct Mounting, Female Thread, Vacuum Inlet: -

Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø32, Stage: 2.5 Stage, Guide Attachment: w/Mesh Attachment, Connection Thread: G1/8, Direct Mounting, Male Thread, Vacuum Inlet: -