RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 IY-G02 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 0.2 0.4 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 IY-G03 10 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04 Y-G04 32, 40 10

CLQ

+0.4 +0.2 -0.2 -0.4 -0.2 -0.4 -0.3 -0.5 -0.3 -0.5 -0.3 -0.5 -0.3 -0.5 +0.058 0 20 10.5 12.8 14 M10 x 1.25 M10 x 1.25 20 25.6 +0.058 0 +0.4 +0.2 +0.058 0 22 16 12 14 M14 x 1.5 M14 x 1.5 36 41.6 +0.058 0 +0.5 +0.3 +0.058 0 28 20 16 20 M18 x 1.5 M18 x 1.5 44 50.6 +0.070 0 +0.5 +0.3 +0.070 0 38 23 21 27 M22 x 1.5 M22 x 1.5 56 64 +0.070 0 +0.5 +0.3 +0.070 0 44 24 24 31 M26 x 1.5 M26 x 1.5 64 72

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

to 5.6 0 to 6 0 to 11.5 0 to 12 0 to 16 0 to 20 0 to 25 Stroke adjustment range When exceeding the stroke fine adjustment range: Utilize a made-to-order specifications -X416 and -X417.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MXF

0 CX o D-X 20Data !9 !8 i !5 u !7 q !

Support Guide/11-LEFG Series

1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

L o a d F ' t _ .

Title not found

L o a d F ' t _ .

HRX-OM-M090

Model number: HRS0-N-0 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

17

9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

212

[C] 32 to 212 [0 to 100] Ambient temperature F [C] 32 to 140 [0 to 60] Parts in contact with uid Diaphragm PTFE Body PFA Construction Integral ttings/LQ3 w Component Parts e No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !



Manifold can be mounted to VEX1B33, VEX1230 3. 14-6-2 3 Precision Regulator Series VEX130 3 Specifications VEX1B33M5 01 VEX113 01 02 0 3 VEX123 01 02 0 3 VEX133 02 03 04 0 3 VEX153 04 06 10 0 3 VEX173 10 12 0 3 VEX193 14 20 0 3 VEX1A33M5 01 Model Operation Manual (Push locking slotted type) Manual handle (Push locking slotted type) and Air operated type Internal pilot External pilot can be

Ionizer

L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.5 MPa (20 L/min (ANR) per nozzle) Air purge: Yes 20 15 Discharge time (s) Discharge time (s) 15 10 1 Hz/60 Hz Static Neutralization Equipment 10 1 Hz/60 Hz 5 5 Sensing DC Sensing DC 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 Distance (mm) Distance (mm) Alphabetical Index Length Measuring/ Counter Supply pressure: 0.7 MPa (30 L/

MIW/MIS

Calculation of applied lateral load The lateral load F equals the total load of the work piece. Thus, F = x m g (N) 1. Calculation of applied lateral load F The lateral load F equals the coefficient between the work piece and the conveyor. Thus, from the total amount of the work piece and coefficient of friction, F = x m g (N) 2.

Escapements Series MIW/MIS

Calculation of applied lateral load The lateral load F equals the total load of the work piece. Thus, F = x m g (N) 1. Calculation of applied lateral load F The lateral load F equals the coefficient between the work piece and the conveyor. Thus, from the total amount of the work piece and coefficient of friction, F = x m g (N) 2.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

VQZ1000/2000/3000

/VQZ 95 , N.O.) 1 2 3 1 2 3 0 1 0 1 Caution 3 port valves have the same external appearance as the 5 port valves. When using this type, 4(A) port on the 3 port valves can be used as 4(A) port on the 5 port valves manifold, too. Besides, theres no problem, even though 2(B) port can be either plugged or unlugged.

Modular Type Lubricator Series AL

P1 = 0.1MPa 0.04 0.04 0.02 0.02 Selection 0 0 15000 10 5000 Warning 1. Do not introduce air from the outlet side as this can damage the damper. Caution 1.