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of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

ZP

thread) B B4 M4 x 0.7 B5 M5 x 0.8 19.5 Model A B Vacuum inlet direction q Pad dia.

ZP

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway dimensions b l Body A l h (h9) b (h9) Series CRB2BW400 0.030 4 20 0 0.030 4 15 2-M5 x 0.8 Connection port for side port 9 4.5 1 CRB2BW40-SE/DE

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B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

SYJ3000/5000/7000

Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x

CQ2

Standard Bore (mm) Stroke range (mm) (mm) Q N M J F I E K2 G H K1 Th9 B C D L P W Z A 0 0.043 0 0.052 5 to 30 12 15 3.5 10 32 25 5 1.5 5.2 6 6 3.5 37.2 30.2 M3 X 0.5 15.5 M5 X 0.8 15 5 to 30 16 15 3.5 38 31 20 10 38 29 6 1.5 6 8 8 3.5 M4 X 0.7 M5 X 0.8 20 0 0.043 0 0.043 5 to 50 20 5.5 25.5 17.5 43 34 9.5 47 36 8 2 8 7 10 4.5 M5 X 0.8 M5 X 0.8 13 5 to 50 25 5.5 28 19 47 37 11 52

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

CRB2/CRBU2/CRB1

B C D R Model 31 45.5 14 M5 x 0.8 CDRBU2WU10-D 25 47 18 M5 x 0.8 CDRBU2WU15-D 34.5 51 20 M5 x 0.8 CDRBU2WU20-D 47.5 55.5 22 M5 x 0.8 CDRBU2WU30-D 52 Rotary Actuator with Angle Adjuster Free-Mounting Type Series CDRBU2WU Dimensions: 40 (with Angle Adjuster and Auto Switch Unit) Single vane/Double vane type CDRBU2WU40-S, D h Keyway dimensions L b h (h9) L b (h9) Model 52 64 0 0.030 4 20 0 0.030

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TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Reference figure 136 Base Mounted 10-SY3000/5000/7000 Type 41P 10-SY3000: 10-SS5Y3-41PStations -M5, C4, N3 C6, N7 [ ]: AC For M5 x 0.8 One-touch fitting (Pitch) 15 P = 12.5 7 (Pitch) : 6, 1/4" Applicable tubing O.D.: 4, 5/32" (A, B port) 15 P = 12.5 7 (A, B port) M5 x 0.8 6.5 20.7 6.5 20.7 B B B B A A A A L2 L1 4 + 13.6 8.5 + + (3.2) (For mounting) 4 x 4.5 50 5.6 2.9 82.1 [84.3] 117.1 [121.5

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

20 5 15 20 15 B B B B 5 VP4 1.5 2n-M5 X 0.8 (Pitch) P=10.5 15.5 1.5 2n-One-touch fitting (A, B port) (A, B port) 15.7 (Pitch) P=10.5 Applicable tube: T0425 VQ Other dimensions are the same as the M5.

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Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104

4/5 Port Air Operated Valve Series SYJA3000

Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8

KJ

M5 x 0.8 M-5ALHN-6 M-5ALHU-6 Width across flats 7 M5 x 0.8 Hose Nipple: M-5H-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5