10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

New

H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge Dimensions Size Port size voltage suppressor) A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4

High Purity Fluoropolymer

J type fitting assembly procedure J type Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !

ISO Standard Hydraulic Cylinder

flange: CHSDFZ Z + Stroke PJ + Stroke GB GA Y J MM 2 x RcP Width across flats G 4 x FD Rod side cushion valve D BB E FY V Head side flange air release MA Air release Head side cushion valve Air release FZ FX B C A K F NA NB H ZZ + Stroke S + Stroke Stroke range Bore size (mm) H K MA MM PJ A B BB C D E F FD FX FY FZ G GA GB J NA P S V Y Z ZZ NB 40 8 25 to 800 52 6.6 70 86 47 M6 x 1 19 M16

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Type Insert pin (single) Insert pin material (J/K type only) Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D Q 2-P T B U W S E K L AA I J R A X AP Y + Stroke AB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V Z + Stroke Non-lock type Lock type 8-AF AC AD AE Rod end lock Q Y + Stroke R Head end lock Dimensions not marked with an are the same as standard.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

MQQ

thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CJ5-S

CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.

CJ5-S

CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.

Proposals for Energy Saving

Y Actuators 4-MM depth M XAH7 depth XL +0.2 0 I D 2 x 4-J E MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

CE

J Mounting bracket part no.

CE

J Mounting bracket part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ131 (H) (Y) Voltage1 to 6 VQ131 (H) (Y) Voltage1 to 6 Pilot valve assembly Pilot valve assembly t t Note 1) (Y): 0.5W (H): 1.5W Note 1) (Y): 0.5W (H): 1.5W 1.10-205 Construction Construction: Plug Lead Unit/VQ0 Metal seal Rubber seal Component Parts Component Parts No.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67

Modular Type Filter Regulator Series AW

y y e e r r r u u u Drain Drain Drain Parts list Material No.

51

Basic, Foot, Rod flange, Head flange, Clevis (Used for changing the port location by 90) Mounting Male rod end Female rod end 0.2 J 0.29 J 0.46 J 0.84 J 1.4 J 2.38 J 4.13 J 6.93 J Allowable kinetic energy Symbol Specification 0.11 J 0.18 J 0.29 J 0.52 J 0.91 J 1.54 J 2.71 J 4.54 J -XA Change of rod end shape Operate the cylinder within the allowable kinetic energy.