Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

Series SY100 3 Port Solenoid Valve Rubber Seal

Applicable blank plate assenbly SY100-77-1A VZ P R 20 stations 20 R port VS A port M5 X 0.8 P port M3 X 0.5 M5 X 0.8 M5 X 0.8 Note 1) SY114 (A) and SY124 (A) cannot be mounted on the same manifold.

Thermo-chiller

type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option

IDX-OM-U021

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

IDX-OM-M051

Rear Ball valve Test button Flush button Option: V Heavy-duty IDF100F auto drain Check the operation once a day. Option: V IDF125F Option: V IDF150F Enlarged view of part B IDF100F~150F-W 1.3 Name and function of parts 1 5 IDX-OM-M051 Air Dryer 1. Name and Function of Parts Layout of parts on front panel Controller Refer to 3.6 for checking operation.

IDX-OM-Z004

K 1.6MPa 1.2.4 P 1.2.5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1.2.6 V ON 1.5 OFF 0.5 1.2.7 5 4 1.2 IDF100150F-W 1 2 IDX-OM-Z004 1 1.3 A ( 4) ( 4) Y 3 A 1.3 IDF100150F-W 1 3 IDX-OM-Z004 1 ( 5) ( B 5) Y V IDF100F V IDF125F V IDF150F B 1.3 IDF100150F-W 1 4 IDX-OM-Z004 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3

TABLE OF CONTENTS

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

3 Port Solenoid Valve

Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 5 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Body ported S070C-G-32 Grommet

Air Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAVM9NA v v V v v IC circuit 3-wire (PNP) M9PAVM9PA v v V v v 2-wire 12 V M9BAVM9BA v v V v v Water resistant (2-color indicator) Water resistant type auto switches can be mounted on the above models, but

Magnet Gripper

V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV V V V v v 2-wire 12 V M9BV V V V v v 3-wire (NPN) 5 V, 12 V M9NWV V V V v v IC circuit 3-wire (PNP) M9PWV V V V v v 2-wire 12 V M9BWV V V V v v Relay, PLC Diagnostic indication (2-color indicator) 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAV v v V v v IC circuit 3-wire (PNP) M9PAV v v V v v 2-wire 12

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Relay, PLC 12 V Yes Yes 24 V (B54) B54 100 V, 200 V 2-wire C73C 12 V Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 K79 K79C 3-wire (NPN) H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 5 V, 12 V IC circuit Grommet 3-wire (PNP) 12 V 2-wire Connector 3-wire (NPN) G59W G5PW K59W 5 V, 12 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V 3-wire

S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

EXxx-OMY0006CN

DO (n+1) 0 V DO (n) FE / Shield Output interface Output interface Short circuit Short circuit protection protection Output circuit / Output circuit / Bus interface Bus interface 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS BUS Fig. 12-3 EX245-DY1 79

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

PSxx-OMR0001CN

10(p-p)10() 25 mA 1 (NPN PNP) 10 mA 26.4 V 1 V (10 mA ) 0.005 mm 0.010 mm 0.020 mm (25 ) 0.010 mm 0.015 mm 0.030 mm 0 0 (3) (20) 2 LCD 3 7 (/) 6 7 () IP67 5 050 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 C 4 6 G1/8(ISO1179-1) F G1/8(ISO1179-1) M12-4 4 4 5 m 0.72 mm 1.14 mm M12-4 4 4 1.14 mm 23 5 4 5 m46 8 6 5 m 0.50 mm 1.00 mm(26 )