F/ISE

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

ZSE F/ISE

Y, Z directions 3 times each (Not energized) 3% F .S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel 630, Fittings: Stainless steel 304 02: R 1/4, M5 x 0.8 T2: NPT 1/4, M5 x 0.8 5-wire oil proof heavy-duty cable (0.15 mm2) Approx. 120 g (Each including 3 m lead wire) PF2 Enclosure Ambient temperature range Ambient humidity range

5 Port Solenoid Valve Series SV

related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.4 0.8 1.2 1.6 2.0 2.4 2.8 3.2 3.6 4.0 800 MB 63 10% 30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

AR20-B to AR60-B

0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2 1/8 70 91.7 35.8 33.8 M42 x 1.5 33.8 3.5 28

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

AR Series Modular Type Regulator

M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5 45.5 22.5 7 AR40-A 1/4, 3/8, 1/2 1/8 70 100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

VFRA3000

VFRA3111-03 VFRA3211-02 VFRA3211-03 VFRA3311-02 VFRA3311-03 VFRA3411-02 VFRA3411-03 VFRA3511-02 VFRA3511-03 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 0.38 0.39 0.41 0.36 0.40 0.39 0.42 0.42 0.33 (0.48) 0.34 (0.47) 1.9 2.2 1.9 2.0 1.8 1.9 1.7 1.8 1.9 (0.69) 2.2 (0.69) 0.61 Single 1/8 2 position 0.71 Double 1/8 Body ported Closed center 0.72 1/8 Exhaust center 0.72 1/8 3 position Pressure center

VXA31/32

Manifold base Individual port Rc Applicable valve Base weight (g) VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Construction/ Principal Parts Material 1/8 1/4 1/8 1/4 VXA31 5-00 n x 100 + 50 VXA32 5-00 n x 160 + 70 Model/Valve Specifications Av x 10 -6 (m 2) Cv converted C [dm 3/(sbar)] b Cv Oil Air Flow characteristics Max. operating pressure differential (MPa) Orifice

ITV

regulator ITV2050-212S-X26 SMC REGULATOR SMC REGULATOR VBA UNLOCK LOCK RESET SET VE VY G 1 2 3 Stations AL Manifold base (3 stations) IITV20-02-3 (1) 1set (3 station manifold base part no.) 1set (Electro-pneumatic regulator part no.) (2) IITV20-02-3 ITV2030-312S-X26 P398020-13 ITV2050-212S-X26 1set (Blanking plate assembly part no.) 1set (Electro-pneumatic regulator part no.) (2) The

5

Applicable bore size B C D d H NT-02 20 13 15.0 12.5 M8 x 1.25 5 LT LH NT-03 25, 32 17 19.6 16.5 M10 x 1.25 6 NT-04 40 22 25.4 21.0 M14 x 1.5 8 LF LE LY LG 2 x LD (mm) Mounting Nut Part no. Applicable bore size L LC LD LE LF LG LH LR LT LX LY LV Included pin part no.

Model Selection 1

Hydrogen peroxide x x x x x x Liquid Hydrosulfide acid Isopropyl acetate x x x x x x x x x x x x Water + Gas Liquid Select an air-operated, chemical valve. I Solvent for painting.

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ) ZPY Pad dia.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

JXCx-OMT0061CN

(P.59) 11 - 3. 3.1 (DC24V) DC24V10% 3A 5A A/B 800 / RS485 Modbus EEPROM LED PWR LED ALM L ERR CC-Link L RUN CC-Link 20m oC40 oC() 0 90%RH ) oC60 oC () -10 90%RH ) 2 4.9m/s IP20 50MDC500V 170g() 190g(DIN ) [CC-Link ] CC-Link Version 1.10 1 2 4 (/) 32 /32 4 /4 64 /64 8 /8 128 /128 16 /16 156k/625k/2.5M/5M/10Mbps NRZI (EIA RS485) HDLC 16+X 12+X 5+1) CRC(X

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Lubrication Equipment

0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10 Auto Feed Lube ALF400 to 900 Standard Specifications Auto Feed Lube Auto Feed Tank Model 1 2 ALT-9-IS1 2 ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 ALT-5 ALT-5-ISALT-9 ALT-9-IS2 1 1 1 1 2 4 1 4 3 AIR: OIL: 4 1 4 3 2 1 4 1 Port size 8 3 8 3 1 Fluid Proof pressure Max. operating pressure Air 1.5MPa