99

10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) 66

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Manifold Regulator ARM1000/2000 Series

Manifold Regulator ARM1000/2000 Series Dimensions 14.5 (With pressure gauge) (Mounting hole) ARJ AR425 to 935 ARX (With pressure gauge) Pressure gauge (Option) AMR ARM ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66

Compact manifold regulator ARM5 Series

Unit Representation Metric size Inch size Symbol Description Display unit for product name plate and pressure gauge: MPa Display unit for product name plate and pressure gauge: psi 4 6 4 6 Straight Elbow Straight Elbow Symbol Symbol Nil 5/32 1/4 5/32 1/4 Note) Z 04 05 16 17 54 55 66 67 Note) This option is available for use outside Japan only. (The SI units must be used in Japan.) 3.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(K) ARP40(K) 28.5 Note 2) 1/8 40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(K) ARP40(K) 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66

AR Series Modular Type Regulator

U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66

CQS, low friction type, Mountings: basic, foot, front and rear flange, double clevis, Bore sizes: 12, 16, 20, 25mm, Strokes up to 50mm, Auto switch capable, Cyl, Microspeed, Dbl Acting, COMPACT CYLINDER, 66 lb

steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260°C (swivel elbow -5 to 150°C), Applicable tube material: FEP, PFA, modified PTFE, nylon, soft nylon, polyolefin, polyurethane, soft polyurethane, hard polyurethane, soft polyolefin, antistatic soft nylon, antistatic polyurethane, Grease-free, FITTING, MALE CONNECTOR, INSERT FITTING, STAINLESS STEEL, 66

Round or square objects work well with the four-finger MHS4. 2 finger parallel style air gripper, Four fingers, Bore sizes: 16, 20, 30, 32, 40, 50, 63 (mm), Thirteen different switches in .5mm or 3mm lead wire lengths, MHS, Parrallel Style Air Gripper, GRIPPER, 66 lb

SOFT NYLON 66, CONNECTORS, TS SOFT NYLON TUBING, CX, TS 4MM, .49401 lb, Description/Model SpecificationsOutside diameter mmMax. operating pressure MPaMin. bending radius mmOperating temperature CMaterialNylon tubingT042541.013?20 to 60Nylon 12Soft nylon tubingTS042540.812?20 to 60Nylon 12

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

.) + 0x10 (parameter type) 0x13 Total unit No. and parameter type 47 Unit ID 0x9B EX600-SEN3-X80 ID EX600-SEN3-X80 48 Unit parameter Unit parameter (Refer to page 95) (Unit3) 49 to 54 Channel parameter (CH0 to 7) Occupies 27 bytes 55 to 60 Channel parameter (CH8 to 15) Channel parameter (Refer to page 95) 61 to 66 Channel parameter (CH16 to 23) 67 to 72 Channel parameter (CH24 to 31) 73 0x02

PFxx-OMP0001CN

IN(66) IN OUT OUT IN 8cm () Rc1/2NPT1/2Rc3/4NPT3/4 2830 Nm 1/2 30 mm 3/4 35 mm 9mm 2F.S. -16No.PF-OMP0001CN-F FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMP0001CN-F NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28 V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28 V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28 V 80 mA 1 V 0.4V ()30 msec

HRX-OM-M090

PV SV 5.19 Communication function HRS Series 5-66 HRX-OM-M090 Chapter 5 Display and setting of various functions 50. Select contact output signal 1 selected alarm from the table below with [] key or [] key, and confirm by pressing SEL.

HRX-OM-R016

selected alarm status is output Signal for Run timer set status is output Signal for Stop timer set status is output Signal for the recovery from power failure is output Signal for anti-freezing setting is output Pass through signal of contact input signal 1 Pass through signal of contact input signal 2 Signal output during automatic fluid filling 5.18 Communication function HRS Series 5-66

HRX-OM-O021

selected alarm status is output Signal for Run timer set status is output Signal for Stop timer set status is output Signal for the recovery from power failure is output Signal for anti-freezing setting is output Pass through signal of contact input signal 1 Pass through signal of contact input signal 2 Signal output during automatic fluid filling 5.19 Communication function HRS Series 5-66

HRX-OM-R005

selected alarm status is output Signal for Run timer set status is output Signal for Stop timer set status is output Signal for the recovery from power failure is output Signal for anti-freezing setting is output Pass through signal of contact input signal 1 Pass through signal of contact input signal 2 Signal output during automatic fluid filling 5.19 Communication function HRS Series 5-66