PSxx-OMM0002CN

No.PS-OMM0002CN-F / / ZSE80(F) ISE80(H) 2 9 10 11 14 14 16 17 19 19 21 21 21 F0 23 F1 OUT1 24 F2 OUT2 27 F3 27 F4 / 28 F5 30 F7 31 F8 32 F9 34 F10 35 F98 36 F99 38 39 42 42 43 50 50 52 -1No.PS-OMM0002CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

Modular F.R.L. Unit

Note 12) Consult P/A for detailed dimensions and available attachments and options. 21

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8

Precision Cylinder Series MTS

#4) SMTS20, #3 7 Precision Cylinder Series MTS Dimensions/25 MTS25 Basic type 12 10 53.5 51.5 2-cushion needle Width across flats 11 7.5 6 Rod cross section 7 6 2-M5 x 0.8 (port size) 28 0.2 16.5 15 M6 x 1.0 4.5 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21

Compact End Lock Cylinder Series CBQ2

A + Stroke DL LL DM MO HR W 32 45 25 15 22 15 33.5 DM With front lock 40 52.5 29 21 26 19 38.5 50 59 29.5 21 24 19 45 63 64 28.5 21 25 19 50 63 cylinder tube configuration Q F A + Stroke B + Stroke Rod end male threads (mm) With rod end male threads H1 Bore size (mm) L1 C1 X H1 32 20.5 23.5 M14 x 1.5 28.5 40 20.5 23.5 M14 x 1.5 28.5 50 26 28.5 M18 x 1.5 33.5 C1 63 26 28.5 M18 x 1.5 33.5 X

e-Rodless Actuator

Applicable auto switches/For detailed auto switch specifications, refer to page 17 through 21. Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Auto switch part no.

Slide Tables MX Series

Bolt used Max. tightening torqueN.m{kgf.cm} l mm Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10.5 12.5 16 21 26 32 1.2{12.2} 1.2{12.2} 2.8{28.6} 5.7{58.1} 5.7{58.1} 10{100} M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 3. Top body tapped A hand can be caught by an adjuster option.

Series MXP Precision Air Slide Table

Product Features .pages 158-159 Q Q MXP Series Q How to Order .page 160 Q Specifications .page 161 Q Table Accuracy .page 162 Q How to Select .pages 163-164 Q Table Deflection .page 165 Q Construction/ Parts List, Seal Kits .page 166 Q Dimensional Drawings.pages 167-170 Q Auto Switch Specifications and Mounting.pages 171 Q Please see safety instructions on pages 20-21

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

hexagon socket head plug. 7 Mechanically Jointed Rodless Cylinder High Precision Guide Type Series MY2H Stroke adjusting unit Low load shock absorber MY2HT Bore size Stroke L G (Shock absorber stroke) T S TT E SD EY EA EC Stroke adjusting unit Shock absorber FA EB W Applicable cylinder MY2HT16 MY2HT25 MY2HT40 Shock absorber model RB1007 RB1412 RB2015 E 14.4 19.7 29.1 EA 7 10.7 15.1 EB 21

3 Port Solenoid Valve SYJ300/500/700 Series

Power Consumption (0.5W) Interchangeable with the NVJ and NVZ Vacuum Applicable Base Mounted/Body Ported Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q Q How To Order .page 19 Q SYJ300 .pages 20-21

High-precision Digital Pressure Switch

For details of each setting, refer to page 21 to 62 of this manual. Do not touch the LCD during operation. The display can vary due to static electricity. Maintenance Turn off the power supply, stop the supplied air, exhaust the residual pressure and verify the release of air before performing maintenance. There is a risk of unexpected malfunction.

Booster Relay Series IL100

fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Lock-Up Valve IL201/211/220 Series

O-ring NBR 22 O-ring NBR 172 Lock-Up Valve IL201/211/220 Series Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel

IN20267

Figure 11-1 MPC Group Power Connections The diagram illustrates the Ethernet communication and power cable connections required to support 21 MPCs when daisy chaining is in use. The MPCs in the dashed box form a single Power daisy chain group. Note that power daisy chaining supports a maximum of 20 MPCs in one power group.

Precision Regulator

(Nm) Recommended Proper Torque IR1000 IR2000 IR3000 12.5 21 21 4. If a directional switching valve (solenoid valve, mechanical valve, etc.) is mounted on the supply side of the precision regulator and repeatedly switched ON and OFF, wear of the nozzle/flapper section will be accelerated and a discrepancy in the setting value may occur.

KN Series Nozzles for Blowing

31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1 49.6 47.8 62.8 17.4 17 25.4 25 24.5 24.1 21.1 25.4 23.7 33.6 31.8 40.1 38 52.4 8 8 19 20 21 21 22 36 37 75 76 149 152 328 D H1 A L1 Reference dimensions after R thread installation.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

5 16 1 4 1 4 3 8 17.46 26 17 33.5 22.23 7 17.9 30.5 25.0 3 8 31.5 22 21 33.9 Applicable tubing Reference dimensions after NPT thread installation.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail 12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21

HRL

Temperature stability: 0.1C (CH1) When a load is stable When a load is stable 0.1C By controlling the inverter compressor, inverter fan, and electronic expansion valve simultaneously, it maintains the good temperature stability when the heat load fluctuates. 22 Circulating fluid temperature [C] Circulating fluid temperature [C] CH1 21 20 19 26 kW load 18 0 kW load 17 0 10 20 30 40 When a

Slider Type Ball Screw Drive/11-LEFS Series

AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21