s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

for 12 VDC, 600 7 for 24 VDCVariableVoltage free input: 0.4 V or less (Reed or Solid state), input for 30 ms or longer2-screen display (Main screen: 4-digit, 7-segment, 2-color, Red/Green Sub screen: 6-digit, 11-segment, White)Output 1, Output 2: Orange12 to 24 VDC p10%50 mA or lessIP650 to 50 C (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

IDX-OM-P023E

Change ground water to tap water.) b) Consult a water treatment consultant about how to treat the water. c) Change the cooling method from transient type to circulating type, and use applicable facility water.

IDX-OM-P026E

Change ground water to tap water.) b) Consult a water treatment consultant about how to treat the water. c) Change the cooling method from transient type to circulating type, and use applicable facility water.

DOC1001947

Description Material Note 1 Body A Stainless steel 2 Body B Stainless steel 3 Needle Stainless steel 4 Knob Stainless steel 5 Lock nut Stainless steel 6 C-ring Stainless steel 7 Seat ring Aluminum alloy 8 U-seal FKM 9 O-ring FKM 10 O-ring FKM 11 Seal FKM 12 Cassette Stainless steel 13 Gasket Stainless steel/FKM M5 type 14 Seal FKM G thread type 10 - Revision history A version: Size 1/4, 3

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

KS/KX

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.2.0-7 and 2.0-8 for more detailed precautions of every series. Caution qMinimize the load shown below to protect the ball bearing. A flexible polyurethane tube is recommended. Kl Ml Hl Dl MS Tl 2.1-32 Series KS/KX Male connector: KSH (Standard) Tube O.D.

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

4 1 1 1 2 1 4 1 2 32 5 Nil: Non-locking push type 40 6 Valve size 5 to 7 50 7 Note) Air operated only Note) Semi-standard Electrical entry/With light/surge voltage suppressor Valve size 1 to 4 Valve size 5 to 7 Electrical entry Symbol Table (1) Applicable Fluids VNAA (Valve material: NBR seal) VNAB (Valve material: FKM seal) VNAC (Valve material: EPR seal) GS Grommet with surge voltage suppressor

Bore sizes range from 7/16in. to 2in. and standard strokes from 1/2in. to 12in.. Double acting single rod , Bore sizes *: 7/16, 9/16, 3/4, 7/8, 1 1/16,1 1/4, 1 1/2, 2 , Mounts: nose, rear, end, rod, block , Variety of switches and lead wire lengths, Optional Rod Boot, CYL, AIR 7/16 BORE, SW C *LQA, ACTUATOR, NCM ROUND BODY CYLINDER, FE, 7/16 INCH NCM DBL-ACT AUTO-SW, .00000 lb