Lock-Up Valve IL201/211/220 Series 0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !
Cylinder Speed Checker (Sensor head + Display part) e Auto switch with pre-wired connector D-M9NSAPC 2 pcs. Auto switch with pre-wired connector PCA-1557798 1 pc. Y connector w Display part w Display part e Auto switch with pre-wired connector The sensor head is not used when the checker is used for the time required for stroke/operation count measurement.
When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White
Inlet valver Filter (Sintered metal)t IP Drain cock IW 1301 1301 Construction AW 1301 IL1 IL2 e IT CP Component Parts r Material IS Note Basic type External main parts: Stainless steel w No.
thread depth P Model Nominal size Pitch Allowable eccentricity U Maximum operating tensile and compressive force N Center of sphere R M A B D E F G H Weight kg JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 30.5 34 38 47.5 0.03 0.05 0.12 0.23 300 800 1250 3100 13 17 22 27 8 9 13 15 0.5 0.5 0.75 1 7 8 11 13.5 21 24 31 41 4.5 5 6 7.5 7 8 11 14 17.5 19.5 20 25 8 10 14 18 1.25 1.25 1.5 1.5 44
E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.
Description Material 1 Body Aluminum die-casted 2 (B) 4 (A) 2 Spool assembly Aluminum/FKM e 3 Plug (For the -X1) Steel 1 High Speed Pilot Operated Solenoid Valve DXT1215 Series How to Order Valves DXT1215 T 5 Wm U 01 N X1 w y e r t u q q Coil type w Rated voltage e Electrical entry M8 connector1 T With power-saving circuit 5 24 VDC Wm WO With straight connector cable Without connector cable
Flow Rate Characteristics FH99 e Element replacement When the pressure difference reaches 24 kPa during filter operation (actuating the differential pressure indicator), stop operation and either wash or replace the element. If any scratches or damage are found on the O-ring during assembly/disassembly, replace with a new O-ring.
Seal 7 Non-asbestos Seal 42047#1 (1 pc.) 8 Note) Consult with SMC when replacing parts since special tools are required for replacement. 17 Series HAW Dimensions HAW2/7 E F 2 x V Rc 2 x Y Rc Air outlet Air inlet Cooling water outlet Q 87 G K J H Cooling water inlet S L T 2 x 2 x U D W Rc N (M) Drain B C A HAW22 to 110 Air outlet Air inlet F E HAW110-30 P 2 x Y Rc 2 x V Screw-in (Z) (L) (ZA
Signal contents 1 24 VDC + Operating environment Ambient temperature: 0 to 40C, Humidity: 20 to 80%RH, (no condensation) L 100-240 VAC 2 24 VDC 1 2 E PE DC output connection Thermo-con (HEF002-A6, INR-244-831) N E Not for use with other products The power supply cable can only be used for the applicable models shown below. Do not use it for other products.
Thread type and port size C D E Material Number of 1 set Male thread A side Female thread B side Mounting hole dia.: 10.5 IDF-AP604 NPT1 Rc1 1.97 (50) 1.06 (27) 1.81 (46) [inch (mm)] Brass 2 IDF-AP606 NPT1 1/2 Rc1 1/2 2.17 (55) 1.22 (31) 2.13 (54) Part no.
Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528
Proper use of float type auto drain See P.6 3 Auto Drain Valve AD402-A Series Construction/Dimensions 82 Width across flats 30 IN Port size 1/4, 3/8, 1/2 q e w r 184.4 t y N.O.: Black N.C.: Gray Clearance for maintenance 30 Port size 3/8 Drain discharge Drain 27 Width across flats Component Parts Port size 1/4, No.
.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--
Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .
E: Emitter Liquid contact part Wetted parts. Parts that are in contact with the process fluid. C: Collector B: Base B: Base E: Emitter C: Collector Load Electrical appliance connected to the output, e.g. relay, solenoid, etc. Fig. (1) NPN type Fig. (2) PNP type Operating humidity range Humidity range for normal operation.
Trace the intersection D to obtain the intersection E. 4. The intersection E is the dew point under pressure 0.7 MPa with the ambient temperature of 30C and the relative humidity of 60%. Value for E is at 62C. 5. Trace the intersection E upward, and C leftward to obtain the intersection D. 6.
Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: C (Flat with Rib), Cup Material: N (NBR), Attachment: with (Guide) Attachment
Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 08 (ø8), Cup Form: U (Flat), Cup Material: N (NBR), Attachment: with (Guide) Attachment