Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Symmetric type Nil Standard L Note 2) Symmetric Auto switch Bore size (Stroke (mm)) Adjuster option Nil Without auto switch Nil AS AT A Without adjuster 6 10, 20, 30, 40, 50 Refer to the table below for auto switch model numbers.

Thermo-chiller Series HRS Compact Type (Except HRS050)

fluid system Facility water system Electrical system Temperature range setting Note 2) (C) Cooling capacity Note 4) (50/60 Hz) (W) Temperature stability Note 6) (C) Pump capacity Note 7) (50/60 Hz) (MPa) Rated flow Note 8) (50/60 Hz) (L/min) Tank capacity (L) Port size 5 to 40 1100/1300 1500/1700 0.1 0.13/0.18 (at 7 L/min) 7/7 Approx. 5 Rc1/2 Stainless steel, Copper (Heat exchanger brazing

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

3 Port 3 Position Valve Body Ported VEX3 Series

VEX312 VEX332 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC. 32 02 1/4 03 3/8 04 1/2 Foot bracket ( VEX312 and VEX332 only) F N* Pilot exhaust (PE) silencer Electrical entry Grommet L plug connector M plug connector DIN terminal G: Lead

VG342

Option VG Rated voltage Pilot valve assembly for VG342 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 VP3 Light/Surge voltage suppressor Nil None 4 External pilot S With surge voltage suppressor (Only grommet type is available.) 24 VDC 12 VDC 5 6 (A) 2 Z With light/surge voltage suppressor (Except grommet type) 7 240 VAC, 50/60 Hz 9 Other 1 (P) 3 (R) Option

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TM, ZP PAD SIZE 2-8, 0.11482 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.0022 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.02755 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, INO-3769 PAD SIZE 2-8, VACUUM SERIES, INO-3769 VACUUM PAD, TL, INO-3769 PAD SIZE 2-8, 0.05511 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.01 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.17215 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.02755 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, INO-3769 PAD SIZE 2-8, VACUUM SERIES, INO-3769 VACUUM PAD, TL, INO-3769 PAD SIZE 2-8

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.05511 lb

Controller (Step Data Input Type) Step Motor (Servo/24 VDC) LECP6 Series Servo Motor (24 VDC) LECA6 Series LECP6 Series LECA6 Series

When conformity to UL is required, the electric actuator and controller should be used with a UL1310 Class 2 power supply. 560

Guide Cylinder Series MGG

Contents Bore size (mm) CBG1N20-PS CBG1N25-PS CBG1N32-PS CBG1N40-PS 20 25 32 40 CBG1N20-PS CBG1N25-PS CBG1N32-PS CBG1N40-PS @9 #0 #1 #2 Rod seal Set of left nos. @9, #0, #1, #2 Piston seal NBR Tube gasket Lock piston seal Seal kit includes @9 to #2. Order the seal kit, based on each bore size. Seal kit includes a grease pack (10 g).

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.05511 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 2.866 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 2-8, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.17215 lb

Vacuum pad with adapter , Vertical inlet direction , Pad diameter: 2, 3.5, 4, 5, 6, 8, 10, 15, OTHER PAD SIZE 2-8, VACUUM SERIES, OTHER OTHER MISC., TL, OTHER PAD SIZE 2-8, 0.22046 lb