CYP

12-CY1R Features 2 Clean Room Rodless Cylinder Series CYP How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

CYPSeries

12-CY1R 3 Series CYP Clean Room Rodless Cylinder How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

CYPSeries

12-CY1R 3 Series CYP Clean Room Rodless Cylinder How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

IC 5 V, 12 V Terminal conduit 12 V Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Diagnostic indication (2-color) 12 V 2-wire Grommet Water resistant (2-color) 3-wire (NPN) With diagnostic output (2-color) Latch with diagnostic output (2-color) IC 5 V, 12 V H7LF 4-wire (NPN) : Manufactured upon receipt of order.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil 20, 25, 32, 40 TN TF Standard stroke Refer to page 12 for standard stroke.

Low torque Metal seal type Rotary joint Series MQR

Name Material Remarks 1 Body Stainless steel 2 Spool Special stainless steel 3 Sleeve Special stainless steel 4 Plate Aluminium 5 O-ring H-NBR 6 Retaining ring Carbon steel 7 Retaining ring Carbon steel 8 Radial bearing MQR2 to 12-M5 Components / (MQR2 to 12 M5, 2 to 12 circuits) No.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Sine Rodless Cylinder Series REA

13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500 200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

SET 12 Series PSE Operation : Special Setting 3 Auto shift Refer to C Auto shift function on page 14 for details.

LX Series Compact Electric Actuators

r Note) Contact prolection circuit is required wnen connectng t 7 3 l C section detail Cross section BB Q tlccFio $liilB ToilB tiliilrflig[ RiddiU 0uiiles$nries D($ Specifications " ' I lxsrzgA: Stroke (mm) 50, 75, 100, 125, 150 Motof 2-phase stepping motor s-phase stepping motor Screw (mm) sg Lead 6 s8 Lead 12 68 Lead 6 eB lead 12 Max. pay load (hofizontal) 9kg 4.5k9 6kg 3kg Max. pay load

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

310.5 300 283 13.5 13 14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

Multistage Ejector Series ZL

K1 12 25 5 M Z E With valve Without valve ZL1 Lead wire length 1.2mm 12 Nozzle diameter 0.5m 2.9m Nil L Digital vacuum pressure switch specifications Exhaust specifications Built-in silencer Port exhaust Nil P For E (ZSE4) EB (ZSE4B) 25 26 65 27 26 67 Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Lead wire length 0.5 (2.9)m Exhaust port thread specification (port exhaust

IDX-OM-W095

V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

VFS4000-OMY0001

13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4

Process Pump

Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with

NCA1

NY-325 NY-800 NY-1000 CB 1.265 1.515 3.032 CD 0.75 1 1 3/8 CE 2 3/8 3 1/8 4 1/8 CH 1 3/8 1 1/2 2 CW 5/8 3/4 1 F 1 1/4 1 1/2 2 L 1 1/4 1 1/2 2 1/8 A 1 1/8 1 5/8 2 KK 3/4-16 1-14 1 1/4-12 ER 3/4 1 1 3/8 Weight (lbs) 1.50 3.78 9.32 Note: Jam nut, pivot, and cotter pins are included. 12 Alignment Coupler F Shank dia.

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2