Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

VFS Y 5 3 37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B

CLQ

BBA2: For D-A7/A8/F7/J7 Stroke range (mm) Bore size (mm) Stroke range 1 to 50 20, 25 32, 40, 50, 63, 80, 100 1 to 100 Part number: CLQB40-47D-B A 3 mm spacer is installed in standard cylinder CLQB40-50D-B. The B dimension is 79.5mm. The above stainless steel screw kit is used for water resistant auto switch type D-F7BAL when it is shipped mounted on a cylinder.

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

JXCx-OMU0004

-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* B 15m* Shield Vcc B-4 12 C 20m* GND A-4 13 A B-5 7 * * * A A-5 6 B B-6 9 B A-6 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 2 1 14 18 5.5 6.3 B1 A1 17.7 5 6 14.2 10.2 A6 B6 B1 A1 B3 A3 2 1 5.7 16 15 L 11 30.7 64 No.JXC-OMU0004-A 12.

Manifold Specifications

Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83 0.91 0.32 0.27 0.36 0.19 0.20 0.24 Body ported For internal pilot Type VV5Z3-20P VZ323 Note) Value at manifold base mounted, 2 position single

Cylinder with Lock

cover A Aluminum alloy 1 Anodized 24 Rod cover B Aluminum die-cast 1 Chromated 25 Bushing B Bearing alloy 1 26 Cylinder tube Aluminum alloy 1 Hard anodized 27 Piston rod Carbon steel 1 Hard chrome plating 28 Piston B Aluminum alloy 1 No.

NCA1

How To Order NC D A1 B 150 0400 R + 0200 H XC11 Auto Switch Mounting Bore Stroke B-A Stroke B Dual Operation Single Rod Cushions Both Ends N w/o Cushions H Head End R Rod End Dimensions (in) Bore (in) MM KK A AA B BA C D DD E EA EE G J NT TN WF XT Y LF P A PB PC 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1/4-20 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200

MGG

1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Fieldbus system PROFIBUS DP compatible SI unit

-B Analogue output unit parameters (1) Parameter setting No.

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

single (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure

RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000

Table of Contents

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

Digital Flow Switch (Manifold type)

Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

VZS

Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch

Integrated Controller

Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 9. When an actuator is operated with one end fixed and the other free (ends tapped or flange), a bending moment may act on the actuator due to vibration generated at the stroke end, which can damage the actuator.

CLQ

1 y @2 @3 w !9 r e !7 @1 !2 !6 !8 q !1 A B A' B' Without magnet Extension locking u t @5 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When shipped Section A-A' Retraction locking !0 !5 Section B-B' !3 !

Programless controller (with stroke study) Step motor (servo 24 VDC)

B-3 Lock B-1 Red 4 Lock A-1 Black 5 A-3 Terminal Sensor B-3 Brown 1 no.