NGIP seies

M o u n V F l a n g e M o u n t . . . . . . . . . 7 4 Construction/Parts List . . .

SRP

x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

SRP

x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Non-standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB(X10) Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 360 A section

Precision Clean Regulator Series SRP

x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

VQ1000V-OMV0001

M5 M5 M5 1/6~1/4 1~1.5Nm 5 No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / DC ( ( ( ( ) ) ) ) 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ISO VG32 IP65 IP67IEC60529 IP65 IP67 (MSDS) [ [ [ [ ] ] ] ] 1 ISO VG32 11 ISO VG32 2 ISO VG32 2 6 No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) 3 30 ( ) 1 VG32 2 (

VQZ100V-OMT0001

(NPN ) No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1 1.5Nm ( ( ( ( ) ) ) ) 2 2 2 2) ) ) )Rc Rc Rc Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 DC & & & & / / / / Best Pneumatics Best Pneumatics Best Pneumatics Best Pneumatics No. No. No.

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

ZSE30/ISE30

x 0.8; T1 type: NPT 1/8, M5 x 0.8 Front case: PBT; Rear case: PBT; Piping port: C3602 (electroless nickel plated) Sensor pressure: Silicon; O-ring: NBR Material Weight 43g (without lead wire) Note 1) When switch output is selected, analog output is not available.

Pressure Control Equipment

1 Pressure Control Equipment Regulators Series Application/Characteristics Port size Set pressure (MPa) Option Page Miniature regulator ARJ1020F Direct operated relieving type Back flow function Manifold M5 0.1 to 0.7 14-4-4 1 8 / 14-4-6 Miniature regulator ARJ210 Direct operated relieving type Bracket Pressure gauge M5 to 0.2 to 0.7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

ZSE1/ISE1

x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Unit Size: 7 (75mm), Cup Flange Shape: N (without Flange), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP3P (Bellows Type for Film Packaging Workpieces), Cup Diameter: 20 (ø20), Cup Form: JT2 (2.5-stage Bellows), Cup Material: SF (Silicone Rubber, Blue), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 20 (ø20), Cup Form: U (Flat), Cup Material: S (Silicone Rubber , White), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: U (Flat), Cup Material: S (Silicone Rubber , White), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: N (without Flange), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP3P (Bellows Type for Film Packaging Workpieces), Cup Diameter: 25 (ø25), Cup Form: JT5 (5.5 Bellows), Cup Material: SF (Silicone Rubber, Blue), Attachment: with (Guide) Attachment

LIQUID CANISTERS

. :: 8055 E.

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

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Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .