Fieldbus system Ethernet POWERLINK compatible SI unit

EX600-ZT1 (6)Assembled type connector PCA-1446553: For EtherNet/IPTM communication, M12 (4 pin) Plug, D code PCA-1578078: For power supply, 7/8 inch, Plug, Cable O.D. 12 to 14 mm PCA-1578081: For power supply, 7/8 inch, Socket, Cable O.D. 12 to 14 mm (7)Power supply cable PCA-1558810: Cable with 7/8 inch connector, Socket, Straight 2 m PCA-1558823: Cable with 7/8 inch connector, Socket, Straight

HEC-OM-S008

Name Alarm flag 1,2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Unused 1 ERR01 System error 1 2 ERR02 System error 2 3 ERR03 Back-up data error Alarm flag 1 4-10 Unused 11 ERR11 DC power supply failure 12 ERR12 Internal temperature sensor High temperature failure 13 ERR13 Internal temperature sensor Low temperature failure 14 ERR14 Thermostat alarm Alarm given off status

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

11-cqs-e

3 12, 16 12, 16 !2 !4 !3 !3 20, 25 20, 25 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series CQS. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no. Contents Bore size (mm) !2 !3 !4 Left no. !

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

CU

15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

MDHR2/MDHR3

Note 2) When holding a workpiece close at the end of open/close stroke of fingers, detecting performance of the combinations listed in the above table may be limited, depending on the hysteresis of an auto switch, etc. 12-12-10 12-12-11

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

0 NBR Detent assembly AXT335-12-3 AXT335-12-3 AXT335-12-3 !1 NBR Gasket AXT333-14 AXT333-14 AXT333-14 !2 NBR Gasket AXT333-15 AXT333-15 AXT333-15 !3 NBR Gasket AXT334-7 !4 NBR Gasket ( ): For DC !5 Solenoid Capsule Assembly (With rubber plug) Specifications Part no.

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

SMC Basic Pneumatics

Supply should be "1", the outputs 2'and "4', the pilot port connecting"l" with 2" is then "12" etc. Table 7.2 shows the tour main sets of port identifications in use. Preterred are now the numbers.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Description Side cover Bearing retainer Sensor rail Bumper End cover A End cover B Inner cover Motor cover Auto switch Magnet Brake Material Note 50W/100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy IIR PC PC PC PC Rare earth magnet 12 13 14 15 16 17 18 19 20 21 22

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Branch tee LQ1B P.10 6 1 2 3 Female 4 5 P.11 6 1 2 3 Union elbow LQ1E 4 5 P.12 6 1 2 3 Union tee LQ1T 4 5 P.13 6 1 2 3 Panel mount union LQ1P 4 5 P.14 6 1 2 3 Union LQ1U 4 5 P.15 6 4 Union flange LQ1F 5 P.15 6 Note) Basic size With reducer Features

Mechanical Valves Series NVM, NVFM, NVZNI

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

Compact Cylinder Series NCQ8

IC circuit Solid state switch Reed switch 5 V A96V A96 Yes Grommet IC circuit Relay, PLC A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5

For Water Digital Flow Switch Series PFW

Refer to pages 1 through 7. 23 Series PFW Dimensions/Integrated Display Type for Water PFW704/720 Internal circuit and wiring examples 67 L 6 58 60 Brown 1.6 17 Load Main circuit Main circuit Load Black LED Green + OUT1 12 to 24VDC White LED Red FLOW SWITCH OUT2 UP Blue 54 44 34 SET PFW7--27 (-M) OUT2 OUT1 DOWN FOR WATER Brown OUT1 2-Port size 4-4.5 40 50 Black + 12 to 24VDC LED Green