NVZseies

n"*, "".""",o Apdlcable Y6lv.3 r{v2110-ooo-M5 NVZ120-8OO-M5 (Pressure to R) Top po ed NW32l-Or-O1 (Special Order onty) Notes .lt ls impossiblo to use NVZl10 and NVZ'I20 together on the standard manifold base. R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base.

3 Way,3 Port Solenoid Valve NVZ Series

n"*, "".""",o Apdlcable Y6lv.3 r{v2110-ooo-M5 NVZ120-8OO-M5 (Pressure to R) Top po ed NW32l-Or-O1 (Special Order onty) Notes .lt ls impossiblo to use NVZl10 and NVZ'I20 together on the standard manifold base. R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

IZ-OMK0015

Attach the ionizer body and brackets with M5 screws. (5) Adjust the angle of the ionizer body to make the static neutralization effective, and fix with the rotating set screws (M5) of each bracket. (6) Make sure to ground with the ground resistance of 100 ohms or less by connecting DC1(-) lead wire [blue] M5 M5 screws of the power supply cable.

Flow sensor

PFMV5 series recommended fitting list One-Touch fitting/Series KQ2 Type Tube dimension mm Port size Model Male Connector KQ2H04-M5 4 M5 x 0.8 Hexagon socket head male connector KQ2S04-M5 Male elboe KQ2L04-M5 One-Touch mini/Series KJ Type Tube dimension mm Port size Model Male Connector KJH04-M5 Hexagon socket head male connector KJS04-M5 4 M5 x 0.8 Male elboe KJL04-M5 Miniature fitting/Series

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

(B) 2 (A) 4 Symbol 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Port size Valve model Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: N (NBR), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: G [Fiber (Honeycomb), Glass Fiber Material], Nominal Filtration Accuracy: 10 μm

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: N (NBR), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket), Made to Order: X78 (Differential Pressure Indication Switch)