VXF Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.
Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.
Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,
9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.
ISE20B-T 0x0013 (19) 0 R Product ID e.g.
1 q t i PF2D540 o !0 u !0 !2ywr e !
G N T NPT NPTF Bracket is mounted. External pilot type is not available.
Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g
dimensions XAH7 depth XL 4-YY depth YL XB XAH7 a b X0.02 c d e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW
Thread type Rc NPT NPTF G Symbol Nil N T F VCL23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Series "" is the symbol for mounting. Add a "" in front of the part numbers for solenoid valves, etc. to be mounted. 2 3 4 Class 2 Class 3 Class 4 Enter together in order, counting from station 1 on the D side.
for each symbol only and cannot be used for actual model selection. 2 0 147 2 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 100W 15mm /10mm lead Horizontal Mount Without Coupling How to Order 1 F 2 PA Stroke LG1 H202 Power voltage Cable length 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Frame material Nil Aluminum alloy T
R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10
Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature
AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715
AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Options ( The number of sets provided when selected in t differs by the size.) q 3 m exhaust duct hose Model: ZVB-D3A r Emitter Model: IZN10-NT-X325 Model: ZVB-AC1 e AC adapter Model: ZVB-P1A w Dust collecting bag ZVB201 set ZVB402 sets ZVB201 set ZVB402 sets y Suction slope (For ZVB20) Model: ZVB-V20A Model: ZVB-V40A u Suction slope (For ZVB40) Model: ZVB-N10A t Additional air blow nozzle
S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.
9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !