CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Industrial Filters

tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133 1620 31 Industrial Filter FGG Series How to Order FGG S B 20 B N 002 A G1 Symbol Option Pressure gauge type G46-10-02M (Brass at wetted

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

CLK1

Magnetic Field Resistant Reed Switch (D-P7, D-P8) Clamp side lock (B) 3-Rc 1/4 Unclamp side port Rear cushion valve Top width across flats 3 L + Stroke 3-Rc 1/4 GA 4-M6 x 1 Thread depth 12 52 171010 14 N GB W Clamp side port 3 32 45 45 BX M 3 Approx.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

MNB

D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5

MNB

9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

AC Servo Motor Driver (CC-Link Type)

1)9 RY(n 1)B RX(n 1)A Problem ALM 15 to Reserved RX(n 1)B Remote station communication ready CRD RY(n 1)F RX(n 1)C to Reserved RX(n 1)F Programmable PC or PLC...etc LECSC Driver (RWwn) LECSC Driver Programmable PC or PLC...etc (RWrn) Address No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1> Unit 0 Unit 1 DY#B SEN3 Digital output SI unit End plate Valve unit 1 byte output 4 bytes output Input data: None Output data: (Unit 0) Digital output unit (EX600-DY#B): 1 byte occupied (Unit 1) SI unit (EX600-SEN3): 4 bytes occupied When Diagnostic mode 0 is selected Input data Output data Byte 0 Byte 0 DY#B (Unit 0) Output 0 to 7 Padding data Byte 1 Byte 1 Output 0 to 7 Byte

Air Combination

Part name Main material AC50(A,B)-D AC20(A,B,C,D)-D AC30(A,B,C,D)-D AC40(A,B,C,D)-D AC40(A,B,C,D)-06-D AC60(A,B)-D (1) Seal HNBR Y220P-050S Y320P-050S Y420P-050S Y520P-050S Y620P-050S Note 1) The number in the table and structural drawing is consistent with the number in [8. How to Replace the Products] (P23) and [9. Disassembly Drawing] (P24).

Compressed Air Preparation Filter

Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V r Port size + a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option t Nil Without auto drain V V V V V b Float type auto drain C*4 N.C.

Modular Type Air Filter Series AF

F 30 41 50 50 G 27 40 54 54 H 22 23 26 25 E 18 16 17 14 C 10 14 18 20 D 40 53 70 70 P 57 73 73 B 97 129 165 169 A 40 53 70 75 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFD20 AFD30 AFD40 AFD40-06 162 198 202 137 173 177 136 172 176 34

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

CATALOG VC10

2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 SS BR AL 1/8 NPT 7 4 2 1/8 NPT 8 5 2 1/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28

C95

Rod end nut Tie-rod nut Tie-rod Cushion ring B Cushion ring A 1 6-1 1 6-2 4 u i o !

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23