5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

Auto Switch Guide

RE A B REC Locking ring CX How to connect Sleeve CY Connector AC: Connect to terminal no. 1 and no. 2 DC: Connect (+) to no. 1 terminal and () to no. 2 terminal.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

T

VMG Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated J D NBR, Stainless steel I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g A B C D E M Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9

Single Axis Electric Actuator Series LJ1H

1 B G LJ1 10 H W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Cable entry direction None B contact specification 2 pcs.

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

High Vacuum Angle Valve

114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

Air Pilot Operated Series NVSA

I$ODEL NO. 2 , 1 3 (s4) S P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

Series 10-, 21- AW-B Filter Regulator

Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model Port size 1/4, 3/8, 1/2 3/4 3/4, 1 Pressure gauge port size 1/8 Fluid Air 5 to 60C (with no freezing) Ambient and fluid temperature Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

Air Pilot Operated

I$ODEL NO. 2 , 1 3 (s4) S P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s 2 MTNG HOLES I .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

MXS

Load rate Ea= K E max Ea=1 0.11=0.11 Work mounting coeficient K: Fig.3 Max. allowable kinetic energy Emax: Table 1 Kinetic energy (E)Allowable kinetic energy (Ea) Possible to use by E=0.0 3 3-1 Load rate of work Calculate static work Wa (N) Wa=1 X 1 X 4=4 K=1 b=1 Wmax=4 a1=1/4=0.25 Wa=K b Wmax Work mounting coeficient K: Fig.3 Allowable load coeficient b: Graph 1 Max.

Compact Cylinder with Lock Series CLQ

BBA2: For D-A7/A8/F7/J7 Stroke range (mm) Bore size (mm) Stroke range 1 to 50 20, 25 32, 40, 50, 63, 80, 100 1 to 100 Part number: CLQB40-47D-B A 3 mm spacer is installed in standard cylinder CLQB40-50D-B. The B dimension is 79.5mm. The above stainless steel screw kit is used for water resistant auto switch type D-F7BAL when it is shipped mounted on a cylinder.

3

VX2 Table (1) Indication of Flow Rate Characteristics VXK Indication by international standard Corresponding equipment Other indications Conformed standard VXD ISO 6358: 1989 JIS B 8390: 2000 C, b VXZ Pneumatic equipment JIS B 8390: 2000 Equipment: JIS B 8379, 8381-1, 8381-2 VXS VXS S Cv VXB ANSI/(NFPA)T3.21.3 R1-2008 IEC60534-1: 2005 IEC60534-2-3: 1997 JIS B 2005-1: 2012 JIS B 2005-2-3

VQC

) Type of actuation Light/Surge voltage suppressor 2 position single 4 position dual 3 port valve (A) (A) 4 (B) 2 (A) 4 (B) 2 With Without Note) Nil E 1 A Note) 5 (R1) 3 (R2) 1 (P) Note) Not applicable to S kit. 5 (R1) 3 (R2) 1 (P) N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) (A) 4 (B) 2 (A) 4 (B) 2 B: Locking type (Slotted) Coil voltage B 12 VDC 5 6 24 VDC Note) Note

Fieldbus system EtherNet/IP compatible SI Unit

1> Unit 0 Unit 1 DY#B SEN7 Digital output SI unit End plate Valve unit 1 byte output 4 bytes output Input data: None Output data: (Unit 0) Digital output unit (EX600-DY#B): 1 byte occupied Output data: (Unit 1) SI unit (EX600-SEN7): 4 bytes occupied When Diagnostic mode 0 is selected Input data Output data Byte 0 Byte 0 DY#B (Unit 0) Output 0 to 7 Padding data Byte 1 Byte 1 Output

Booster Regulator/Air Tank

regulator IN port SRF Booster regulator IN port C C ITV EXH: C EXH: C IC (A) (B) Tank OUT port Rc 3/4 (A) D (B) OUT OUT 355 ITVH 256 256 205 4 x 13 4 x 13 ITVX 50 50 150 150 500 PVQ 250 250 824 (mm) VY1 Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 1/2 D Note) 519 543 Booster regulator model VBA20A VBA40A VBA22A VBA42A VBA43A VBA

Digital pressure switch for energy-saving control ejector

Unit MPa kPa kgf/cm2 bar psi InHg mmHg 0.001 0.1 0.001 0.001 0.02 0.1 1 -24NO.ZK2-OM00501-B [F 1] Setting of OUT1 The output mode of OUT1 can be set. Reversed output, pressure value and hysteresis can be set. List of output modes -25NO.ZK2-OM00501-B Press the or button in function selection mode to display [F 1]. Press the button. Move on to the check of output mode.

Series IDG

Applicable models 0.7MPa (101.5psi) Inlet air pressure IDG3, 5 BM59 25C (77F) 25C (77F) 25C (77F) Inlet air temperature Inlet air saturation temperature Ambient temperature IDG10 BM61 1l/min (ANR) {inlet air pressure at 0.7MPa} IDG20 BM63 Dew point indicator purge air flow rate Port size (nominal size B) Weight kg (with bracket) 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 IDG30, 50 BM64 0.11 0.25