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v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

11-5 IDFB Series 11 3 IDX-OM-W020 11 T IDFB15E-11-T R V CM FM15 OLR C1 ILS PRS PTC PTC r TB12 MC RY TDR GFCI EDV 11-5 IDFB Series 11 4 IDX-OM-W020 12 V 12 V V 12-2 12-1 1. 1 2 2. 3.

All solenoid valve outputs are reset to zero. 2 SV0 V 0 V for valve 3 SW24 V +24 V for input 1 4 5 SW0 V 0 V for input 4 Mode setting 5 FE Ground URL https://www.smcworld.com Mode SW1-10 0 H / W mode Set address and communication speed by SW1 to 8.

Input voltage 1 V 5 V The sensor input range can be set to the required value and displayed. (Voltage input: 1 to 5 V) Pressure switch/Flow switch can be displayed. M For Flow Sensor / PFMV5 Setting of the display for analog voltage A is displayed for 1 V. B is displayed for 5 V. The range can be set as required.

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

wire Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN

x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .

Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V or less IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are

to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

(Ex. : 25.0 C Function : Sets target temperature P V 2 3 . 0 C # 1 S V < 2 5 . 0 C M O D E 3. Control Operation Setting range : 0,1,2,3,4 Indicated content : Number and description of control operation mode.

PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S.

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93V A93 Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9NV M9N F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9PV M9P F7PV J79 M9BV M9B F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F7NWV F9NWV F9NW Relay, PLC IC circuit

To minimize the voltage drop, use 100/200 V AC and 24 V DC wires with the largest sectional areas possible and keep the wiring length as short as possible. 5. The 100/200 V AC wire must not be bundled with or arranged in close proximity with the input/output lines of control terminals or encoder signal lines. If possible, keep a 100 mm or larger distance from such lines. 6.

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93 A93V Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9N M9NV F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9P M9PV F7PV J79 M9B M9BV F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F9NW F9NWV F7NWV Relay, PLC IC circuit

NPN) C76 5 V IC Reed switch Solid state switch Grommet B54 C73 C73C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF 100 V, 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color) Grommet G59 G5P K59 G59W G5PW K59W G5BA G59F 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic

OUT () Brown [Red] Reed switch D-Y7NW(V) D-F9NW(V) Brown [Red] DC (+) Brown [Red] OUT( ) Blue [Black] DC (+) OUT Black [White] Main switch circuit OUT Black [White] Main switch circuit D-A93(V) Brown [Red] LED OUT (+) Brown [Red] Contact protection box CD-P11 CD-P12 DC (-) Blue [Black] Resister Reed switch DC (-) Blue [Black] Zener diode D-Y7PW(V) D-F9PW(V) OUT( ) Blue [Black] DC (+) Brown