CLS

25 30 30 40 164 98 30 30 30 383 40 40 40 45 45 55 30 to 1400 75 133 406 Up to 1400 98 298 383 393 433 507 532 406 416 454 525 550 M30 x 1.5 8 9 0.2 stroke 184 98 393 30 to 1400 75 133 416 98 298 Up to 1400 M30 x 1.5 0.2 stroke 204 106 433 75 141 454 106 338 30 to 1400 Up to 1400 M36 x 1.5 25 31 41 0.2 stroke 228 111 503 85 153 521 115 402 30 to 1800 Up to 1500 M40 x 1.5 M12 x 1.75 0.2

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20

LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Female thread One-Touch fitting Pad diameter (mm) M5 x 0.8 Rc(PT)1/8 4 tube 6 tube 8 tube 30 32 33 10 to 16 128 133 139 20 to 32 158 159 167 40, 50 (g) Additional Weight by Stroke Pad diameter (mm) Stroke (mm) 20 30 40 50 10 to 16 +10.5 +12.5 +22.5 +24 20 to 50 +37.5 +40 +66.5 6 Series ZPT ZPT 10/13/16 F J/K 10-B5-A10 (With Buffer/Female Thread) ZPT 20/25/32 F J/K 10-B01-A14 (With

VQ7-6/7-8

18 (20) 44 (58) 44 (58) Indicator light 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) Rc1/8 Port Y (PE) SMC 108.5 (121.5) 23 (30) (ports A, B) 12 Y 50 (63) 3 5 38 (53) 38 (53) 32 (42) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) 2-Rc3/8, 1/2, 3/4 Ports A, B 30 (42) 30 (42) 10 (11) Dimensions inside ( ) are for Rc3/4 2 position/Single : VQ7-8-FG-DSC Single (reverse

Support Guide/11-LEFG Series

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work

LEH_C

) ()Amm b)30 31 =30 1) ()Amm 2) CW () (CW )30 29 30 1 29 8 - (LEC ) (LEC ) () 2:CCW 1:CW () 2:CCW () 1) 1 100 40 100 / LEHZ(J),LEHF,LEHS 50 100 / LEHZJ10L,LEHZJ16L 2) 100 5 50 LEHZ(J) , LEHS 5 20 LEHF10 5 30 LEHF203240 3) 10 2,000 10 0: 0 21 0 1) P.53 8.3 2) 3) 4) P.40 7.1 9 - 6. !

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

25 14 17.5 M8 x 1.25 18 10 20 M14 x 1.5 30 17 66 50 11 52 176 10 53 88.5 M16 x 1.5 25 9 73 73 53 20 50 28 17 17 M10 x 1.5 20 12 22 30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19

VQ7-6/7-8

) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

This control is not for synchronizing the position of the main axis and slave axis. 10 10 Current position Current position Origin 0 0 Origin 10 20 30 40 50 Axis 1 10 20 30 40 50 Axis 1 For 3 Axes JXC92 Series For 4 Axes JXC73/83/93 Series VParallel I/O/ V Type V Width: Approx. 38% reduction Type V Width: Approx. 18% reduction 78 47 mm shorter 140 30 mm shorter JXC92 JXC73/83 170 125 *

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

Bernoulli Gripper

0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 30 70 60 25 50 Lifting force [N] Lifting force [N] 20 40 15 30 10 20 5 10 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] Supply pressure [MPa] Air Consumption ZNC30m ZNC40m ZNC20m 160 200 140 180 Air consumption [L/min (ANR

Microspeed Cylinder

Strokes Standard stroke (mm) Bore size (mm) 5, 10, 15, 20, 25, 30 10, 16 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 Specific Product Precautions Be sure to read before handling.

Escapements Series MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit