LVQ

PB B A B A B A N.C. N.O. Double acting Double acting N.O. Double acting With flow rate adjustment PA N.C. B A N.C. Inch sizes 07 11 13 19 25 Double acting 1/4 3/8 1/2 3/4 1 With bypass PA PA N.C. PB B A B A Double acting N.C. Double acting N.C. With flow rate adjustment & bypass PA B A N.C. N.C. With indicator PA N.C. B A N.C. High back pressure PA N.C. B A N.C.

MY1

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

A A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 11.5 (8.5) 11.5 (8.5) 16 (12) 19 12.5 (9.5) 12.5 (9.5) 17 (13) 20 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 4.5 (1.5) 4.5 (1.5) 9 (5) 12 (7.5) 14 (10) 0 (2) 0 (2) 1 (4.5) 4 (8

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

VM

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B

HRX-OM-Y120

B contact (normally closed) By default HRL Series 2.4 Contact output signal 2-11 HRX-OM-Y120 Chapter 2 Contact input/output communication/Analog output communication Table 2.4-3 Signal type for contact output signal 4 to 6 No.

HRX-OM-W004

Momentary MT N.C.type B External N.O.type A Used Used Alternate ALT switch signal N.C.type B Used Used SW N.O.type A Used Used Momentary MT input N.C.type B Used Used N.O.type A Without Alternate ALT N.C.type B intput OFF N.O.type A signal Momentary MT N.C.type B N.O.type A Alternate ALT Stop N.C.type B signal STOP N.O.type A Contact input signal 2 Momentary MT N.C.type B External N.O.type

XM, XY

(FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

SMC Wireless System EtherNet/IP ® compatible

10 Reserved Remote DY#B (Unit 0) (Wireless channel 002) byte 11 Reserved Reserved byte 12 DX#D (Unit 1) byte 13 Remote (Wireless channel 002) byte 14 DX#B (Unit 2) byte 15 Reserved Total 16 byte 12 byte Diagnostic allocation: Simple Input data Output data Module name Unit name Module name Unit name DY#B (Unit 0) byte 0 System diagnosis 1 byte 1 System diagnosis 2 EX600-WEN# (Unit 2) Base

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

[46] [54.5] 22.5 1 4.1 32 5.5 P B B B B B B 4.7 35 44.4 <45.1> 10.2 23.5 26 3 R A A A A A A DIN rail (VZ1000-11-1-) G: Approx. 300 H: Approx. 600 [46] [54.5] ( ) lead wire length ( ) lead wire length DIN rail holding screw (Voltage rating indication) 33.2 (Port M5) (Pitch) P = 10.5 13.5 24.3 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 L2 [rail mounting hole pitch 12.5] (

Compact and Lightweight

ZH20DA-11-13-13 112.2 62.2 Inch 1 Dimensions when the standard bracket is mounted Body Ported: ZH D A--S L 18 20 Standard bracket A-A 6 2 x 4.2 4 A 6 3.5 10 12 27 36 A Refer to page 233 for handling the bracket. 15 12 Silencer ZH05 to 15DA Model A B ZH05DA---06/07 23.2 11 ZH07DA---06/07 ZH10DA---08/09 30.8 13 ZH13DA---10/11 41.9 16.5 ZH15DA---10/11 B A ZH18/20DA---12 Directly mounted silencer

SMC Wireless System PROFINET compatible

10 Reserved Remote DY#B (Unit 0) (Wireless channel 002) byte 11 Reserved Reserved byte 12 DX#D (Unit 1) byte 13 Remote (Wireless channel 002) byte 14 DX#B (Unit 2) byte 15 Reserved Total 16 byte 12 byte Diagnostic allocation: Simple Input data Output data Module name Unit name Module name Unit name DY#B (Unit 0) byte 0 System diagnosis 1 byte 1 System diagnosis 2 EX600-WPN# (Unit 2) Base

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section 0.34mm2 (M5) 45.5 50.5 1 P VQ (20) 13 R1 R2 5 3 (11) VQ4 8.5 PE port 16.5 16.5 2-Rc(PT)1/8 P(SUP)port

Clamp Cylinder Series CK1

(Same surface) Hs 22 B A D-A93 24.5 10.5 16.5 50 50 50 D-M9B D-M9BW D-B54 50 50 75 Auto Switch Mounting Position and Its Height Unit: mm 8.5 Auto switch set value and its height 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 Auto switch Symbol 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 A B Hs A B Hs A B Hs D-B54 D-A93 Hs B A 33 D-M9B D-M9BW D-B54 12 Note 1) The

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside